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US 5,082,791 AGranted
Method of fabricating solar cells
AssigneeMobil Solar Energy Corporation
InventorsRonald H. Micheels, Percy Valdivia, Jack I. Hanoka
Life of this patent
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Abstract
A solar cell fabrication procedure is described in which an excimer laser is used to cut a trench in a flat solar cell substrate so as to electrically isolate front and back regions of the substrate. The trench is cut around the perimeter of the cell. The advantage of using an excimer laser is that it will ablate a trench without diffusing conductive material deeper into the cell.
Claims3
A method of fabricating a solar cell comprising in sequence the steps of:
- (a) providing a substrate in the form of a silicon ribbon having front and back surfaces and a polygonal edge configuration formed by a series of side edge surfaces;
- (b) using a source of phosphorus to form a PN junction in said substrate so that said junction extends adjacent to said front and back surfaces and said side edge surfaces;
- and
- (c) using an excimer laser to form a trench in one of said front and back surfaces so that (1) said trench extends adjacent to and has a configuration similar to said peripheral configuration, (2) said trench extends through and interrupts said junction along the entire length of said trench in said one surface, whereby an ohmic contact formed on said front surface will be electrically isolated from an ohmic contact formed on said rear surface, and (3) the use of said excimer laser to form said trench does not cause phosphorus to diffuse deeper into said substrate.
1 more element
Dependencies are inferred from the claim text.