Plating rack
AssigneeMicroelectronics and Computer Technology Corporation
InventorsIan Y. K. Yee, James D. Wehrly, Jr.
Life of this patent
Estimating the term…
Abstract
A plating rack for use in electroplating at least one substrate includes a rack body onto which the subtrate may be placed; a metal ring connected to the rack body so as to surround a substrate placed on the rack body; and bistable, single-tipped cam assemblies for holding a placed substrate in place and for making electrical contact between the metal ring and the substrate.
Claims15
A plating rack for use in electroplating at least one substrate having an outside edge, said plating rack comprising:
- a substantially one piece rack body onto which said substrate may be placed;
- an exposed metal ring connected to said rack body so as to completely surround said outside edge of said substrate when placed on said rack body;
- and
- means for both passing current from said metal ring to said substrate when placed on said rack body and for holding said substrate in place on said rack body, said means comprising at least one element having only a single point of contact when in contact with said substrate.
A plating rack for use in electroplating at least one substrate having an outside edge, said plating rack comprising:
- a rack body onto which said substrate may be placed;
- a metal ring connected to said rack body so as to surround said outside edge of said substrate placed on said rack body;
- and
- means for both passing current from said metal ring to said substrate when placed on said rack body and for holding said substrate when in place on said rack body, said means comprising at least one element having only a single point of contact when in contact with said substrate.
- wherein said means for both passing current from said metal ring to said substrate when placed on said rack body and for holding said substrate when in place on said rack body comprises a plurality of cam assemblies,
- wherein each of said plurality of cam assemblies are held by a spring loaded element that rides in a slot in each of said plurality of cam assemblies, and
- wherein each of said plurality of cam assemblies can be hand rotated to readily remove them from the spring loaded element.
A plating rack for use in electroplating at least one substrate having an outside edge, said plating rack comprising:
- a rack body onto which said substrate may be placed;
- a metal ring connected to said rack body so as to surround said outside edge of said substrate when placed on said rack body;
- and
- means for both passing current from said metal ring to said substrate when placed on said rack body and for holding said substrate when in place on said rack body, said means comprising at least one element having only a single point of contact when in contact with said substrate.
- wherein said means for both passing current from said metal ring to said substrate when placed on said rack body and for holding said substrate when in place on said rack body comprises a plurality of cam assemblies, and
- wherein each of said plurality of cam assemblies has a single probe tip.
Dependencies are inferred from the claim text.