Peltier cooled lithium-drifted silicon x-ray spectrometer

A method of eliminating vibration caused by a lithium-drifted silicon detector within a scanning electron microscope, comprising the steps of:

• cooling the lithium-drifted silicon detector with a multi-stage Peltier cooling stack;
• mounting said multi-stage Peltier cooling stack to a means for heat sinking;
• cooling said means for heat sinking with a closed circuit flow of liquid having a high specific heat;
• and
• cooling said liquid by means of a radiator having a forced air flow mechanically and physically remote from said lithium-drifted silicon detector such that vibrations in the cooling system are substantially isolated from said lithium-drifted silicon detector.

An energy dispersive x-ray spectrometer, comprising:

• a lithium-drifted silicon detector;
• a FET preamplifier in communication with the detector;
• a cold finger having a first end adapted for mounting of the detector and the FET and a second end;
• a heat shield means for reducing radiant heat transfer, the heat shield means having disposed within it the cold finger;
• a cap having disposed within it the heat shield means, the heat shield being supported within the cap by a plurality of insulating spiders;
• a multi-stage Peltier cooling stack in thermal communication at a cold end with said second end of the cold finger, and at a hot end with a heat sink;
• a cooling system physically and mechanically remote from an assembly comprising the lithium drifted silicon detector, the cooling system having a closed circuit flow of liquid through said heat sink;
• connecting means for thermally connecting the cold finger to the cooling stack, the connecting means substantially reducing the ability of the cold finger to act as a lever and crack the Peltier cooling stack;
• and
• flexible means for thermally connecting the heat shield means to the cooling stack.