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AssigneeCanon Kabushiki Kaisha
InventorsHisaaki Kawade, Haruki Kawada, Kunihiro Sakai, Hiroshi Matsuda, Yuko Morikawa, Yoshihiro Yanagisawa, Tetsuya Kaneko, Toshimitsu Kawase, Hideya Kumomi, Hiroyasu Nose, Eigo Kawakami
Estimating the term…
A microprobe is constituted by a single crystal having an apex portion surrounded by facets having specific place directions and having specific crystal faces. The microprobe is provided on a part of a main surface of a substrate or a part of a thin film formed on the main surface. In one embodiment the microprobe is provided with a source electrode, a gate electrode, a drain electrode and a thin resistance, so as to form an MOS transistor for amplifying the microprobe.
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate.
A microprobe comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face.
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, wherein said single crystal comprises a different material than that of the substrate or the thin film.
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face, wherein said single crystal comprises a different material than that of the substrate or the thin film.
A microprobe, comprising:
A microprobe, comprising:
A microprobe, comprising a single crystal provided on a part of a thin film formed on a one main surface of a substrate, wherein a portion of said single crystal is in contact with the main surface of the substrate.
A microprobe, comprising a single crystal provided on a part of a thin film formed on a one main surface of a substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said crystal comprising a specific crystal face, wherein a portion of said single crystal is in contact with the main surface of the substrate.
Dependencies are inferred from the claim text.