Time-of-flight ion-scattering spectrometer for scattering and recoiling for electron density and structure

A time-of-flight ion-scattering spectrometer comprising:

• a vacuum chamber;
• means for selectively positioning a sample having a surface to be analyzed within said vacuum chamber;
• means for delivering an ion beam onto said surface at an incidence angle .alpha., said incidence angle being defined between said ion beam and a line projected perpendicularly onto said surface from said ion beam;
• and
• means for detecting both ions and neutral particles emanating from said surface in response to said ion beam striking said surface, said detecting means being adapted to detect said ions and neutral particles at continuously variable scattering angles form 0.degree. to approximately 170.degree. .theta., said scattering angles .theta. being defined between a flight path of said emanated particle and said surface.

A time-of-flight ion-scattering spectrometer comprising:

• a vacuum chamber;
• a sample manipulator adapted to be connected within said vacuum chamber, said sample manipulator being adapted to selectively position a sample in said vacuum chamber;
• an ion beam source being adapted to direct and ion beam onto said sample;
• a first detector;
• a first detector positioner being adapted to be connected with said vacuum chamber, said first detector positioner being adapted to selectively position said first detector along approximately 170.degree. of angular path at a preselected distance from said sample;
• a second detector;
• and
• a second detector positioner being adapted to be connected to said vacuum chamber, said second detector positioner being adapted to selectively position said second detector along a straight path at a preselected angle with respect to said ion beam.

A time-of-flight ion-scattering spectrometer comprising:

• a vacuum chamber;
• at least one tube-like member having a first and second end portion, said first end portion being coupled to said vacuum chamber and said second end portion extending outwardly from said vacuum chamber, said second end portion being adapted to house a first time-of-flight detector;
• and
• a detector manipulator being adapted to be connected within said vacuum chamber and to selectively position a second time-of-flight detector along an angular path with respect to a sample.