Diamond film thermistor
AssigneeKabushiki Kaisha Kobe Seiko Sho
InventorsKoji Kobashi, Koichi Miyata, Kazuo Kumagai, Takayoshi Inoue, Hiroyuki Tachibana, Akimitsu Nakaue
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Abstract
A diamond thin film thermistor having a substrate, an electrically insulating diamond layer formed on the substrate by vapor-phase synthesis, a semiconducting diamond layer as a temperature-sensing part on the electrically insulating diamond layer by vapor-phase synthesis, and metal thin film electrodes attached to the semiconducting diamond layer. A plurality of such diamond thin film thermistors can simultaneously be formed on a single substrate, and the substrate is cut with a dicing saw to provide individual diamond thin film thermistor chips of the same quality.
Claims2
A diamond thin film thermistor comprising:
- a substrate;
- an electrically insulating diamond layer formed on the substrate by vapor-phase synthesis;
- a semiconducting diamond layer formed by vapor-phase synthesis as a temperature-sensing part on the electrically insulating diamond layer;
- and
- metal thin film electrodes attached to the semiconducting diamond layer.
Dependencies are inferred from the claim text.