Valve arrangement of microstructured components

A valve arrangement for the control of fluids constructed of microstructured components, comprising a basic body having a flow path, an actuation element movable relative to said flow path and opening and closing said flow path depending on it position, said actuation element being in the form of a membrane, actuating drive means for effecting a transition from a first position into another position comprising an actuating drive connected to an electrical power source and to said actuation element for moving said actuation element between a switch on and a switch off position, said actuating drive operating according to a first operating principle aiming at covering the longest distance possible, and a holding device formed by said basic body and a condenser plate on said basic body providing for holding said membrane which works according to a second operating principle working independently of the first operating principle and aiming at the generation of the greatest cohesion possible the actuating drive comprising an element of piezoelectric material acting on said closing element.

A valve made of microstructured components, comprising a body having a first face and an opposite second face, said first face having a recess defining a pumping chamber, a channel defined in said body leading from said recess providing a holder and comprising a dielectric having an exterior with a coating and having an opposite interior side facing said body together defining two condenser plates, a coating over said interior side of a material having a coefficient of thermal expansion different from said membrane, and a plurality of electrical heating elements arranged on said actuation membrane defining an actuation drive, wherein said membrane comprises a piezoelectric material and including a condenser plate underlying said membrane.