Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor

A method of manufacturing a plurality of uniform microfabricated sensing devices which comprises:

• (a) establishing a plurality of base sensors on a suitable substrate wafer;
• (b) establishing a permselective layer, superimposed over at least a portion of each base sensor, having a thickness sufficient to exclude substantially molecules with a molecular weight of about 120 or more while allowing the free permeation of molecules with a molecular weight of about 50 or less;
• (c) establishing a photoresist layer comprising a photoformable proteinaceous mixture, superimposed over a substantial portion of said permselective layer;
• and
• (d) establishing a topmost layer comprising a sufficient amount of an immobilized ligand receptor.