Reflection-preventive pellicle film and process for preparation thereof
AssigneeMitsui Petrochemical Industries, Ltd.
InventorsTokinori Agou, Hitomi Matsuzaki, Masaaki Kawasaki
Life of this patent
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Abstract
A reflection-preventive layer composed of a specific polyfluoro(meth)acrylate is formed on one or both of the surfaces of a transparent film of a cellulose derivative. In this reflection-preventive pellicle film, the minimum light transmission in wavelengths of 350 to 450 nm is improved and the average light transmission is improved, and the adhesion of the reflection-preventive layer to the cellulose derivative layer is excellent.
Claims3
A process for the preparation of a reflection-preventive pellicle film, which comprises supplying a solution of a cellulose derivative onto a substrate, forming a cellulose derivative film by the rotational film-forming method, drying the formed film, supplying onto the cellulose derivative film a polymer solution formed by dissolving a polyfluoro(meth)acrylate selected from the group consisting of:
- (1) a polyfluoroacrylate which is a copolymer of (a) trifluoroethyl acrylate and (B) perfluorooctylethyl acrylate having an (A)/(B) molar ratio of from 55/45 to 75/25 and a reduced specific viscosity lower than 1 dl/g, as measured in a m-xylene hexafluoride solution having a coincentration of 0.1 g/dl at 30.degree. C.,
- (2) a polyfluoro(meth)acrylate which is a copolymer of at least one monomer represented by the following general formula:
- ##STR39## wherein R.sup.1 stands for a hydrogen atom or a methyl group, and R.sup.3 stands for a fluoroalkyl group, and at least one monomer represented by the following general formula:
- ##STR40## wherein R.sup.1 is as defined above, and Y stands for a hydrocarbon group containing an intermediate etheric oxygen atom or a hydrocarbon group, containing an intermediate etheric oxygen atom or a hydrocarbon group containing an intermediate etheric oxygen atom, to which a fluoroalkyl group is bonded.
- (3) a polyfluoro(meth)acrylate which is a copolymer of at least one monomer represented by the following general formula:
- ##STR41## wherein R.sup.1 is as defined above, and R.sup.4 stands for a linear fluoroalkyl group not containing an etheric oxygen atom, and at lest one monomer represented by the following general formula:
- ##STR42## wherein R.sup.1 is as defined above, and R.sup.5 stands for a linear fluoroalkyl group containing an etheric oxygen atom or a branched fluoroalkyl group which may contain an etheric oxygen atom,
- and (4) a polyfluoro(meth)acrylate which is a copolymer of at least one monomer represented by the general formula:
- ##STR43## wherein R.sup.1 is as defined above, and R.sup.2 stands for a fluoroalkyl group which may contain an intermediate etheric oxygen atom, and at least one monomer represented by the following general formula:
- ##STR44## wherein R.sup.1 is as defined above, and R.sup.6 stands for an alkyl group, in a solvent capable of dissolving said polyfluoro(meth)acrylate but incapable of dissolving or swelling said cellulose derivative, and forming a reflection-preventive layer by the rotational film-forming method.
A process for the preparation of a reflection-preventive pellicle film having reflection-preventive layers on both the surfaces, which comprises supplying onto a substrate a polymer solution formed by dissolving a polyfluoro(meth)acrylate selected from the group consisting of:
- (1) a polyfluoroacrylate which is a copolymer of (a) trifluoroethyl acrylate and (B) perfluorooctylethyl acrylate having an (A)/(B) molar ratio of from 55/45 to 75/25 and a reduced specific viscosity lower than 1 dl/g, as measured in a m-xylene hexafluoride solution having a coincentration of 0.1 g/dl at 30.degree. C.,
- (2) a polyfluoro(meth)acrylate which is a copolymer of at least one monomer represented by the following general formula:
- ##STR45## wherein R.sup.1 stands for a hydrogen atom or a methyl group, and R.sup.3 stands for a fluoroalkyl group, and at least one monomer represented by the following general formula:
- ##STR46## wherein R.sup.1 is as defined above, and Y stands for a hydrocarbon group containing an intermediate etheric oxygen atom or a hydrocarbon group, containing an intermediate etheric oxygen atom or a hydrocarbon group containing an intermediate etheric oxygen atom, to which a fluoroalkyl group is bonded.
- (3) a polyfluoro(meth)acrylate which is a copolymer of at least one monomer represented by the following general formula:
- ##STR47## wherein R.sup.1 is as defined above, and R.sup.4 stands for a linear fluoroalkyl group not containing an etheric oxygen atom, and at lest one monomer represented by the following general formula:
- ##STR48## wherein R.sup.1 is as defined above, and R.sup.5 stands for a linear fluoroalkyl group containing an etheric oxygen atom or a branched fluoroalkyl group which may contain an etheric oxygen atom,
- and (4) a polyfluoro(meth)acrylate which is a copolymer of at least one monomer represented by the general formula (I):
- ##STR49## wherein R.sup.1 is as defined above, and R.sup.2 stands for a fluoroalkyl group which may contain an intermediate etheric oxygen atom, and at least one monomer represented by the following general formula:
- ##STR50## wherein R.sup.1 is defined above, and R.sup.6 stands for an alkyl group, in a solvent capable of dissolving said polyfluoro(meth)acrylate but incapable of dissolving or swelling a cellulose derivative, forming a reflection-preventive layer by the preventive layer, supplying a solution of a cellulose derivative on the reflection-preventive layer, forming a film of the cellulose derivative by the rotational film-forming method, drying the cellulose derivative film, supplying said polyfluoro(meth)acrylate solution onto the cellulose derivative film, and forming a reflection-preventive layer by the rotational film-forming method.
Dependencies are inferred from the claim text.