Scanning electron microscope and a method of displaying cross sectional profiles using the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsNoboru Nomura, Hideo Nakagawa, Taichi Koizumi, Kenji Harafuji, Mitsuhiro Okuni, Norimichi Anazawa
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Abstract
A scanning electron microscope is disclosed in which an objective lens includes a first pole piece and a second pole piece. The first pole piece is provided with a hole through which an electron beam passes, and is disposed between an electron gun for emitting the electron beam and the second pole piece. The second pole piece has a planar portion on which a specimen is placed, and the second pole piece being mounted on a supporting block movable in a plane substantially perpendicular to the projecting direction of the electron beam.
Claims10
A scanning electron microscope comprising:
- an electron gun for emitting an electron beam;
- an objective lens for forming a magnetic field in a path through which the electron beam passes;
- and
- a secondary electron detector for detecting secondary electrons produced by the impingement of the electron beam on a specimen, wherein:
- said objective lens includes a first pole piece and a second pole piece;
- said first pole piece is provided with a hole through which the electron beam passes, and is disposed between said electron gun and said second pole piece;
- and
- said second pole piece has a planar portion on which the specimen is placed, and said second pole piece being mounted on a supporting block movable in a plane substantially perpendicular to the projecting direction of the electron beam.
A method of displaying cross sectional profiles, comprising the steps of:
- obtaining a plurality of secondary electron signals by scanning a surface of a specimen by electron beams while incrementally varying a focal length of the electron beams by changing a current flowing through an objective lens coil;
- storing said secondary electron signals in relation to respective values of varied focal lengths;
- and
- producing a cross sectional profile of the surface of the specimen on the basis of the values of the incrementally varied focal length and the positions on a surface of the specimen at which the electron beams with focal lengths corresponding respectively to said values is focused.
Dependencies are inferred from the claim text.