Microvalve
AssigneesBurkert GmbH Werk Ingelfingen, Kernforschungszentrum Karlsruhe GmbH
InventorsBernd Kowanz, Dirk Schmidt, Wolfgang Ehrfeld
Life of this patent
Estimating the term…
Abstract
A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It consists of strip-like electrodes (20 and 22) which are arranged opposite to corresponding electrodes of another valve plate. By the application of suitable actuating potentials with the same or opposite polarity to the electrodes of different valve plates the actuating forces may be produced, which are needed for moving the movable valve plate (14).
Claims17
A microvalve, comprising:
- (a) at least a first and a second valve plate each provided with elongated valve ports therethrough and with elongated lands between the valve ports, said valve plates being arranged mutually adjacent and movable with respect to each other substantially in perpendicular to said valve ports between an open setting, in which the valve ports of the first valve plate are aligned with the valve ports of the second valve plate, and a shut setting, in which the lands of the first valve plate are opposite to the valve ports of the second valve plate and the lands of the second valve plate are opposite to the valve ports of the first valve plate to thereby shut off said valve ports;
- (b) each of said first and second valve plate having surfaces which are opposite each other with a small distance therebetween and which are provided with strip-like electrodes thereon;
- (c) said electrodes being aligned substantially in perpendicular to the direction of motion of the valve plates;
- and
- (d) the electrodes of the first valve plate and of the second valve plate being adapted to be supplied with an electrical potential.
Dependencies are inferred from the claim text.