Method for increasing the batch size of a barrel epitaxial reactor and reactor produced thereby
AssigneeMoore Epitaxial, Inc.
InventorGary M. Moore
Life of this patent
Estimating the term…
Abstract
The batch capacity of a barrel epitaxial reactor is improved by increasing the reaction chamber size and increasing the length of the radiant heat source so that a uniform temperature is maintained over a larger flat zone in the reaction chamber. Also, forced air flow from the blower of the reactor is distributed so that a positive air flow is maintained along the exterior wall of the reaction chamber and consequently the wall is maintained at a uniform cold temperature relative to the temperature of the reaction chamber.
Claims23
A barrel epitaxial reactor for processing wafers, comprising:
- a housing wherein said housing originally contained a first reaction chamber means having a wall of a first length, and first radiant energy source means having a first length;
- second reaction chamber means having a wall of a second length and including a susceptor having a flat zone greater than 12 inches in length and less than or equal to about 18 inches in length in a first direction wherein said second reaction chamber means is operatively mounted in said housing and said second wall length is greater than said first wall length;
- and
- second radiant energy heat source means, operatively mounted in said housing, for providing heat energy over said flat zone so that epitaxial layers formed on adjacent wafers in a batch of wafers of the same diameter in said reaction chamber have a resistivity that varies by less than approximately .+-.10%, wherein said second radiant energy heat source means has a second length that is greater than said first radiant energy heat means length.
A package for increasing the batch size of a barrel epitaxial reactor while maintaining the thickness and uniformity performance of the barrel epitaxial reactor, the barrel epitaxial reactor having (i) a housing containing a first radiant energy heat source of a first length, and a first reaction chamber with a flat zone of a first length and a wall of a first length, (ii) a voltage controller for said first heat source, (iii) means for providing gas flow, and (iv) cooling means, said package comprising:
- a second radiant energy heat source, operatively mountable in said housing, for replacing said first radiant energy heat source, wherein said second radiant energy heat source has (i) a radiant energy output in the range of 10-40% greater than the radiant energy output of said first heat source and (ii) a second length greater than said first radiant energy heat source length;
- and
- a second reaction chamber, operatively mountable in said housing, having (i) a flat zone with a length in the range of 25.50% greater than said first flat zone length, and (ii) a wall of a second length greater than said first reaction chamber wall length wherein said second radiant energy heat source and said second reaction chamber are operatively connectable with said voltage controller, said means for providing gas flow, and said cooling means thereby increasing the batch size of the barrel epitaxial reactor.
A method for improving the batch size of a barrel epitaxial reactor while maintaining the thickness and uniformity performance of the barrel epitaxial reactor, the barrel epitaxial reactor having a housing containing a first radiant energy heat source of a first length and a first number of lamps, a voltage controller for said first heat source, a first reaction chamber with (i) a flat zone of a first length and (ii) a wall of a first length, means for providing gas flow, and cooling means, said method comprising:
- replacing said first radiant energy heat source with a second radiant energy heat source, said second radiant energy heat source having (i) a radiant energy output in the range of 10-40% greater than the radiant energy output of said first heat source (ii) a second length greater than said first radiant energy source heat length;
- and (iii) a second number of lamps wherein said second number of lamps is greater than said first number of lamps;
- and
- replacing said first reactor chamber with a second reaction chamber having (i) a flat zone with a length in the range of 25-50% greater than said first flat zone length and (ii) a second wall length greater than said first wall length, wherein said second radiant energy heat source and said second reaction chamber are (i) operatively mountable in said housing and (ii) operatively connectable with said voltage controller, said means for providing gas flow, and said cooling means.
A method as in claim wherein said second radiant energy heat source length is approximately 25% greater than said flat zone of said second reaction chamber.
Dependencies are inferred from the claim text.