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US 5,051,396 AGranted
Method of manufacturing superconducting patterns by adding impurities
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
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Abstract
A manufacturing method of Josephson devices is described. A superconducting ceramic film is deposited on a non-conductive surface and partly spoiled in order to form a barrier film by which two superconducting regions is separated. The spoiling is performed by adding a spoiling element into the ceramic film by ion implantation.
Claims9
A method of producing a superconducting pattern comprising the steps of:
- forming a ceramic superconducting film on a substrate;
- and
- converting a portion of said superconducting film to a non-superconducting state while maintaining the remaining portion at a superconducting state, wherein said converting step is implemented by adding impurities to said portion by ion implantation in order to destroy the superconductivity of said portion, said impurities being selected from the group consisting of Si, Ge, B, Ga, P, Ta, Mg, Be, Al, Fe, Co, Ni, Cr, Ti, Mn and Zr.
A method of forming a superconducting pattern comprising the steps of:
- forming a first ceramic superconducting film on a substrate;
- forming a second ceramic superconducting film on said first superconducting film;
- converting a portion of said second ceramic superconducting film to a non-superconducting region while maintaining the other portion superconducting, wherein said converting step is implemented by adding impurities into said portion by ion implantation, said impurities being selected from the group consisting of Si, Ge, B, Ga, P, Ta, Mg, Be, Al, Fe, Co, Ni, Cr, Ti, Mn and Zr;
- and
- forming a third ceramic superconducting film on said second superconducting film, wherein said third superconducting film is partially electrically isolated from said superconducting film by said non-superconducting region.
2 more elements
A method of forming a superconducting pattern comprising the steps of:
- forming a ceramic film having a superconducting property on a substrate;
- and
- converting a portion of said ceramic film from superconducting to non-superconducting whereby a non-superconducting region is formed between a pair of superconducting regions in said ceramic film film, wherein said converting step is implemented by adding impurities to said portion by ion implantation, said impurities being selected from the group consisting of Si, Ge, B, Ga, P, Ta, Mg, Be, Al, Fe, Co, Ni, Cr, Ti, Mn and Zr.
Dependencies are inferred from the claim text.