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US 5,050,429 AGranted
Microbridge flow sensor
AssigneeYamatake-Honeywell Co., Ltd.
InventorsIkuo Nishimoto, Takashi Kurosawa, Tomoshige Yamamoto
Life of this patent
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Abstract
A microbridge flow sensor includes integral bridge portions and temperature-measuring resistive elements. The bridge portions are integrally formed above the right and left openings of a substrate, respectively. The temperature-measuring resistive elements are respectively formed on the surfaces of the bridge portions.
Claims1
A microbridge flow sensor for detecting material flow comprising:
- integral bridge portions formed on a surface of a semiconductor substrate so as to be spatially isolated from said semiconductor substrate and defining a through hole passing under the bridge portions communicating a right opening to a left opening;
- a detecting portion mounted on a surface of the bridge portions including a heating element extending substantially the length of a bridge portion, and temperature-measuring elements which extend alongside the heating element, wherein a first pair of temperature-measuring elements straddle and abut the heating element and a second pair of temperature-measuring elements straddle the heating element and are disposed in a spaced-apart relationship with respect to the heating element, said microbridge flow sensor detecting a flow speed on the basis of changes in resistance of said temperature-measuring elements;
- and wherein said bridge portions are integrally formed adjacent to the right and left openings, respectively, and substantially at right angles to a direction of flow.
Dependencies are inferred from the claim text.