Twin shaft vacuum pump with purge gas inlet
AssigneeLeybold Aktiengesellschaft
InventorHanns-Peter Berges
Life of this patent
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Abstract
A twin-shaft vacuum pump including a rotor pair mounted for rotation in a pump chamber. The rotor pair together with the chamber wall define a suction side and delivery side of the pump chamber. In order to prevent solid particles suspended in pump fluid from settling in the chamber, the invention provides a flushing gas outlet orifice disposed on the delivery side of the pump chamber and adapted to be connected to a source of flushing gas. The solid particles can thus be held in suspension and conveyed from the pump with the assistance of flushing gas supplied through the orifice.
Claims5
A twin-shaft vacuum pump comprising the following:
- a rotor pair mounted for rotation in a pump chamber together by at least one chamber wall, said rotor pair together with said at least one chamber wall defining a suction side and a delivery side of said pump chamber;
- a flushing gas outlet orifice, adapted for connection to a flushing gas delivery line, disposed within said pump chamber at said delivery side of said pump;
- wherein said pump comprises at least one lateral shield in which said orifice is disposed;
- and
- wherein said rotor pair defines a gap seal between individual rotors, and said orifice is immediately adjacent said gap seal.
A twin-shaft vacuum pump comprising the following:
- a plurality of rotor pairs, each of which is mounted for rotation in a respective pump chamber defined by at least one chamber wall;
- each of said rotor pairs together with its associated at least one chamber wall defining a suction side and a delivery side of said respective pump chamber;
- a plurality of flushing gas outlet orifices, each of which is adapted for connection to a flushing gas delivery line and disposed within said pump chambers at said delivery side thereof;
- wherein said pump comprises a plurality of lateral shields separating said pump chambers from one another;
- and
- said orifices are disposed in said lateral shields;
- and
- wherein each of said rotor pairs defines a gap seal between individual rotors, and said orifices are disposed immediately adjacent said gap seal.
Dependencies are inferred from the claim text.