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US 5,046,077 AGranted
Continuous lattice constant measurments and apparatus therefor within a heat furnace
AssigneeU.S. Philips Corporation
InventorHiromu Murayama
Life of this patent
Estimating the term…
Abstract
The invention discloses a method and an apparatus for measuring lattice spacings in particular of a single crystal during the growth thereof by vapor deposition while located in a heating furnace.
Claims3
A method of measuring lattice constant ratios of crystals comprising the steps of:
- turning a goniometer on the outside of a heating furnace in an arbitrary direction about a crystal substrate disposed inside said heating furnace;
- radiating said substrate with X-radiation from an X-ray tube;
- stopping the rotation of said goniometer at the position at which X-ray diffraction radiated on said substrate from an X-ray tube is detected by a detector;
- prescribing the crystal orientation of said substrate and the position of said X-ray tube;
- growing a crystal different from said substrate crystal on said substrate;
- and
- measuring the ratio of the lattice constant of said different crystal to that of said substrate while said crystal different from said substrate crystal is being grown on said substrate.
4 more elements
An X-ray diffraction apparatus for measuring lattice constant ratios of crystals, comprising:
- a heating furnace;
- a movement base positioned on the outside of said heating furnace;
- a mechanism for turning the movement base positioned outside of said heating furnace in an arbitrary direction about a specimen crystal substrate disposed in said heating furnace;
- a mechanism for fixing said movement base;
- an X-ray tube for radiating the said specimen with X-ray from outside of said heating furnace;
- a detector for detecting X-rays reflected by said specimen crystal substrate;
- and
- a goniometer provided on said movement base.
5 more elements
An X-ray diffraction apparatus for measuring lattice constant ratios of crystals, comprising:
- a heating furnace;
- a movement base positioned on the outside of said heating furnace;
- a gyroscope mechanism for turning the movement base, positioned outside of said heating furnace, in an arbitrary direction about a specimen crystal substrate disposed in said heating furnace;
- a mechanism for fixing said movement base;
- an X-ray tube for radiating the said specimen with X-ray from outside of said heating furnace;
- a detector for detecting X-rays reflected by said specimen crystal substrate;
- and
- a goniometer provided on said movement base.
5 more elements
Dependencies are inferred from the claim text.