US 5,045,696 AGranted

Photoelectron microscope

AssigneeShimadzu Corporation

InventorHideo Hirose

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Abstract

A photoelectron microscope wherein a normal conductive coil is used to produce a divergent magnetic field to form an enlarged photoelectron image of a specimen to be examined. The coil is only momentarily energized by pulse current, and in synchronism with the energization of the coil and while the change of the resultant magnetic field with time is small, the radiation source is actuated to produce a radiation pulse so that the photoelectrons produced upon irradiation of a specimen with the pulse flies through the magnetic field so as to be received by an image forming device. The image forming device is operated in synchronism with and a predetermined variable period of time after the actuation of the radiation source thereby to obtain photoelectron images of the specimen of different energy levels. By skimming only those photoelectrons of low energy which are emitted close to the axis of the magnetic field, it is possible to obtain images of high resolution.

Claims19

Dependent claims

A photoelectron microscope comprising:

a) a specimen holder for holding a specimen to be observed;
b) an electromagnetic radiation source for producing an electromagnetic radiation within a predetermined short wavelength range;
c) a normal conductive coil arranged adjacent to said specimen holder;
d) a first power source connected to said coil;
e) a second power source connected to said connected to said electromagnetic radiation source;
f) a chamber for defining an evacuated space;
g) a controller for producing a first signal to cause said first power source to energize said coil for a predetermined short period of time to produce a divergent magenetic field in said evacuated space and, in synchronism with said first signal, a second signal to cause said second power source to actuate said electromagnetic radiation source to emit an electromagnetic radiation pulse, which irradiates said specimen to emit photoelectrons in said evacuated space;
h) photoelectron image forming means disposed in said evacuated space for receiving said photoelectrons to form a photoelectron image of said specimen;
and
i) image converting means for converting said photoelectron image to a visible image.

7 more elements

Dependencies are inferred from the claim text.