Back to results
US 5,043,002 AGranted
Method of making fused silica by decomposing siloxanes
AssigneeCorning Incorporated
InventorsMichael S. Dobbins, Robert E. McLay
Life of this patent
Estimating the term…
Abstract
This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said production. In the preferred practice, a polymethylsiloxane comprises said vaporizable, halide-free compound.
Claims26
In a method for making a non-porous body of high purity fused silica glass comprising the steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO.sub.2 ;
- (b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 ;
- (c) depositing said amorphous particles onto a support;
- and
- (d) either essentially simultaneously with said deposition or subsequently thereto consolidating said deposit of amorphous particles into a non-porous body;
- the improvement comprising utilizing as said silicon-containing compound in vapor form, a halide-free polymethylsiloxane, whereby no halide-containing vapors are emitted during the making of said non-porous body of high purity fused silica glass.
3 more elements
In a method for making a non-porous body of high purity fused silica glass doped with at least one oxide dopant comprising the steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO.sub.2 and a compound in vapor form capable of being converted through oxidation or flame hydrolysis to at least one member of the group consisting of P.sub.2 O.sub.5 and a metal oxide which has a metallic component selected from Group IA, IB, IIA, IIB, IIIA, IIIB, IVA, IVB, VA, and the rare earth series of the Periodic Table;
- (b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 doped with an oxide dopant;
- (c) depositing said amorphous particles onto a support;
- and
- (d) either essentially simultaneously with said deposition or subsequently thereto consolidating said deposit of amorphous particles into a non-porous body;
- the improvement comprising utilizing as said silicon-containing compound in vapor form a halide-free polymethylsiloxane, whereby no halide-containing vapors from said silicon-containing compound are emitted during the making of said non-porous body of high fused silica glass.
3 more elements
In a method for making optical waveguide fibers of high purity fused silica through the outside vapor deposition process comprising the steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO.sub.2 ;
- (b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 ;
- (c) depositing said amorphous particles onto a mandrel;
- (d) consolidating said deposit of amorphous particles into a non-porous, transparent glass body;
- and
- (e) and drawing optical waveguide fiber from said body;
- the improvement comprising utilizing as said silicon-containing compound in vapor form a halide-free polymethylsiloxane, whereby no halide-containing vapors are emitted during the making of said optical waveguide fibers.
4 more elements
In a method for making optical waveguide fibers of high purity fused silica glass doped with an oxide dopant comprising the steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO.sub.2 and a compound in vapor form capable of being converted through oxidation or flame hydrolysis to at least one member of the group consisting of P.sub.2 O.sub.5 and a metal oxide which has a metallic component selected from Group IA, IB, IIA, IIB, IIIA, IIIB, IVA, IVB, VA, and the rare earth series of the Periodic Table;
- (b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 doped with an oxide dopant;
- (c) depositing said amorphous particles onto a mandrel;
- (d) consolidating said deposit of amorphous particles into a non-porous transparent glass body;
- and
- (e) drawing waveguide fiber from said body;
- the improvement comprising utilizing as said silicon-containing compound in vapor form a halide-free polymethylsiloxane, whereby no halide-containing vapors from said silicon-containing compound are emitted during the making of said optical waveguide fibers.
4 more elements
In a method for making high purity fused silica glass through the outside vapor deposition process comprising the steps of:
- (a) producing a gas stream containing a silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO.sub.2 ;
- (b) passing said gas stream into the flame of a combustion burner to form amorphous particles of fused SiO.sub.2 ;
- (c) depositing said amorphous particles onto a mandrel;
- and
- (d) consolidating said deposit of amorphous particles into a non-porous, transparent glass body;
- the improvement comprising utilizing as said silicon-containing compound in vapor form a halide-free polymethylsiloxane, whereby no halide-containing vapors from said silicon-containing compound are emitted during the making of said high purity fused silica glass.
3 more elements
Dependencies are inferred from the claim text.