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US 5,038,713 AGranted
Microwave plasma treating apparatus
AssigneeCanon Kabushiki Kaisha
InventorsSoichiro Kawakami, Masahiro Kanai, Takayoshi Arai, Tsutomu Murakami
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AssigneeCanon Kabushiki Kaisha
InventorsSoichiro Kawakami, Masahiro Kanai, Takayoshi Arai, Tsutomu Murakami
Estimating the term…
A microwave plasma treating apparatus comprising a vacuum vessel, a device for introducing a microwave to the inside of the vacuum vessel by way of a microwave transmission circuit, a device for supplying a starting gas to the inside of the vacuum vessel, a device for evacuating the inside of the vacuum vessel, and a specimen holder for maintaining a specimen substrate to the inside of the vacuum vessel, wherein a cavity resonator integrated with two matching circuits is disposed in the microwave transmission circuit and a magnetic field generator is disposed to the outside of the cavity resonator, and having the following main features: (a) matching facilitated by a plunger for adjusting the axial length of the cavity resonator and cylindrical sling type irises, E-H tuner or three-stub tuner disposed at the portion of the cylindrical cavity resonator where the microwave is introduced, (b) a bell jar disposed within the cavity resonator to excite TM mode and (c) a magnetic field generator disposed to the outside of the cavity resonator to prepare a region of a great magnetic flux density in the discharging space at the inside of the cavity resonator.
A microwave plasma treating apparatus comprising a vacuum vessel, having a cavity resonator and a waveguide, means for introducing a microwave to the inside of said vacuum vessel by way of a microwave transmission circuit, means for supplying a starting gas to the inside of said vacuum vessel, means for evacuating the inside of said vacuum vessel, and a specimen holder for maintaining a specimen substrate in the inside of said vacuum vessel, wherein said cavity resonator is integrated with two matching circuits and disposed in said microwave transmission circuit, a magnetic field generator for generating a magnetic field in the discharging space inside of said cavity resonator is disposed to the outside of said cavity resonator, said two matching circuits integrated with said cavity resonator comprising an axial length varying plunger and a sliding type iris for said cavity resonator.
Dependencies are inferred from the claim text.