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AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, James V. McManus, Bruce A. Luxon
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Scavenger compositions are disclosed, which have utility for effecting the sorptive removal of hazardous gases containing Group II-VII elements of the Periodic Table, such as are widely encountered in the manufacture of semiconducting materials and semiconductor devices. Gas sorption processes including the contacting of Group II-VII gaseous compounds with such scavenger compositions are likewise disclosed, together with critical space velocity contacting conditions pertaining thereto. Further described are gas contacting apparatus, including mesh structures which may be deployed in gas contacting vessels containing such scavenger compositions, to prevent solids from being introduced to or discharged from the contacting vessel in the gas stream undergoing treatment. A reticulate heat transfer structure also is disclosed, for dampening localized exothermic reaction fronts when gas mixtures comprising Group II-VII constituents are contacted with the scavenger compositions in bulk sorption contacting vessels according to the invention.
A scavenger composition, comprising a support having associated therewith, or covalently bonded thereto, a polyvinylphenoxy metal compound.
A scavenger composition, comprising a support having associated therewith, or covalently bonded thereto, a sulfonic acid constituent in a form reactive with gaseous ammonia to form a quaternary ammonium complex.
A scavenger composition comprising an active scavenging species scavengingly effective for hydrogen fluoride associated with, or covalently bonded to, a support comprising a fluorocarbon polymer.
A method of treating a gas mixture comprising gaseous compound(s) containing Group II-VII elements, to reduce the concentration of said gaseous compound(s) therein, comprising contacting said gas mixture with a bed of a scavenger composition which is scavengingly effective for said gaseous component(s), at a gas mixture contacting rate of greater than about 1000 volumes of gas mixture per volume of bed per hour,
A method for removing arsine and/or phosphine from a gas comprising same, including contracting the gas with a bed of a scavenger composition which is scavenging effected therefor, at a gas contacting rate of greater than about 1000 volumes of gas per volume of bed of the scavenger per hour,
Dependencies are inferred from the claim text.