Deposition of superconducting thick films by spray inductively coupled plasma method
AssigneeRegents of the University of Minnesota
InventorsYuk-Chiu Lau, Emil Pfender
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Abstract
A method is provided to apply a coating of a superconducting ceramic oxide to a substrate comprising introducing an atomized aqueous solution comprising at least three metal salts into inductively coupled plasma so as to deposit a superconductive ceramic oxide on the substrate, or alternatively, to deposit a mixed metal oxide on the substrate, which is converted into a superconductive ceramic oxide by post-annealing.
Claims20
A method to apply a superconducting ceramic oxide by employing the techniques of inductively coupled ultrahigh temperature plasma deposition comprising:
- (a) introducing an atomized aqueous solution containing at least three metal salt precursors into an inductively coupled ultrahigh temperature plasma in relative amounts effective to deposit a coating of a mixed metal oxide on the surface of a heated substrate;
- and
- (b) annealing the mixed metal oxide coating in an oxygen atmosphere to yield a superconducting ceramic oxide coating.
A method to apply a superconducting ceramic oxide by employing the techniques of inductively couple ultrahigh temperature plasma deposition comprising introducing an atomized aqueous solution containing at least three metal salt precursors into an inductively coupled ultrahigh temperature plasma, wherein said salt precursors are present in the necessary relative amounts, and wherein said plasma contains at amount of oxygen, effective to deposit a superconducting ceramic oxide coating on the surface of a heated substrate.
Dependencies are inferred from the claim text.