Method of making a multi-layered article
AssigneeSpectrum Control, Inc.
InventorsDavid G. Shaw, Angelo Yializis, Donald S. Strycker, Mooyoung Ham
Life of this patent
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Abstract
A high speed process for forming a multi layered thin film structure in a vacuum wherein each film is less than about four microns thick and the total layers can reach upwards to 4,000 or more. The polymeric layers are formed of a cross linked component selected from the group consisting of polyfunctional acrylates and mixtures of polyfunctional acrylates and monocrylates with the component having a preferable molecular weight of between 200 and 300 and a vapor pressure preferably in excess of 1.times.10.sup.-2 Torr. The polymeric layers may be interleaved with metal layers.
Claims36
A high-speed process for forming a multi layered article having a plurality of substantially delamination free, pin hole free and void free layers, comprising the following steps:
- (a) providing a vacuum chamber containing:
- i) a movable support, ii) at least one vapor outlet of a dielectric flash vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, and, iv) means for maintaining said support at a temperature below that of said vaporizer;
- (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1.times.10.sup.-4 Torr;
- (c) selecting a curable component comprising:
- i) polyfunctional acrylates, or ii) mixtures of monoacrylates and polyfunctional acrylates, said mixtures having an average of about two or more olefinic groups per molecule, said curable component having:
- i) an average molecular weight between 150 and 1,000, and ii) a vapor pressure in the range of 1.times.10.sup.-6 to 1.times.10.sup.-1 Torr at standard temperature and pressure;
- (d) metering a quantity of said curable component into an inlet portion of said vaporizer;
- (e) flash vaporizing said component within said vaporizer;
- (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec;
- (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less;
- (h) activating said curing means whereby a substantially cross linked polymer film is formed on said support;
- and,
- (i) repeating steps (c) through (h) whereby a multi layer article is formed.
A high-speed process for forming a multi layered article having a plurality of substantially delamination free, pin hole free and void free layers, comprising the following steps:
- (a) providing a vacuum chamber containing:
- i) a movable support, ii) at least one vapor outlet of a flash vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, and iv) means for maintaining said support at a temperature below that of said vaporizer;
- (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1.times.10.sup.-4 Torr;
- (c) selecting a curable component comprising:
- i) polyfunctional acrylates, or ii) mixtures of monoacrylates and polyfunctional acrylates, said mixtures having an average of about two or more olefinic groups per molecule, said curable component having:
- i) an average molecular weight between 150 and 1,000, and ii) a vapor pressure in the range of 1.times.10.sup.-6 to 1.times.10.sup.-1 Torr at standard temperature and pressure;
- (d) metering a quantity of said curable component into an inlet portion of said vaporizer;
- (e) flash vaporizing said component within said vaporizer;
- (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec;
- (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less;
- (h) repeating steps (c) through (g) whereby a plurality of films of said component are deposited;
- and,
- (i) activating said curing means whereby said films are cured to form a substantially cross linked polymer film on said support.
A high-speed process for forming a multi layered article having a plurality of substantially delamination free, pin hole free and void free layers, comprising the following steps:
- (a) providing a vacuum chamber containing:
- i) a movable support, ii) at least one vapor outlet of a flash vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, iv) means for maintaining said support at a temperature below that of said vaporizer;
- and v) means for depositing an inorganic material;
- (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1.times.10.sup.-4 Torr;
- (c) selecting a curable component comprising:
- i) polyfunctional acrylates, or ii) mixtures of monoacrylates and polyfunctional acrylates, said mixtures having an average of about two or more olefinic groups per molecule, said curable component having:
- i) an average molecular weight between 150 and 1,000, and ii) a vapor pressure in the range of 1.times.10.sup.-6 to 1.times.10.sup.-1 Torr at standard temperature and pressure;
- (d) metering a quantity of said curable component into an inlet portion of said vaporizer;
- (e) flash vaporizing said component within said vaporizer;
- (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec;
- (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less;
- (h) activating said curing means whereby a substantially cross linked polymer film is formed on said support;
- (i) repeating steps (c) through (h) and,
- (j) depositing a layer of inorganic material on one or more substantially cured polymer films whereby a multi layered article comprising a plurality of polymer layers and at least one inorganic material layer is formed.
Dependencies are inferred from the claim text.