Broken blade detector for semiconductor die saws
AssigneeMicron Technology, Inc.
InventorsWarren M. Farnworth, Ed A. Schrock
Life of this patent
Estimating the term…
Abstract
A dicing saw for semiconductors includes a defect detector which is used for stopping operation of the dicing saw when such operation would be adverse to the integrity of the work product (semiconductor dice). Infrared light from a light transducer is transmitted from a light transmitter to a detector at an opposite side of the saw's blade from the transmitter. Infrared light from a light transducer is also reflected from the dicing saw blade edge back to the transducer, permitting detection of reflected light along with the detection of light across the blade.
Claims19
Damaged blade detector for a dicing saw which is controlled by an automated machine controller for cutting work by grinding the work by means of a rotary grinding blade comprising:
- (a) a light source;
- (b) a light guide assembly, the light guide assembly guiding light from the light source to the blade of the saw;
- (c) a first detector for detecting light transmitted by said source, said detector positioned adjacent to the saw axially opposite the wave guide assembly for receiving energy transmitted past the saw blade;
- (d) the light guide assembly further receiving reflected light from the blade;
- (e) a second detector detecting levels of said light reflected through the light guide assembly;
- (f) a support for the light guide assembly to adjustably position the light guide assembly with respect to the rotary saw;
- (g) a register to provide an indication of modulation levels of the transmitted light as detected by the first detector beyond a predetermined limit of acceptability;
- and
- (h) a second register to provide an indication of modulation of the reflected light as detected by the second detector beyond a predetermined limit of acceptability;
- (i) a stop control circuit in the automated machine controller for stopping the operation of the rotary saw in response to said indications of modulation;
- and
- (j) the light source being positioned with respect to the saw blade so that normal wear of the saw blade does not require readjustment of the position of the damaged blade detector, including the position of the light guide assembly, but unacceptable damage to the saw blade will be detected by the detectors sensing wear beyond a wear limit of the blade, the wear limit being determined by a distance from an initial blade position which indicates that a normal wear limit is being exceeded and which represents a distance beyond which a defect in the blade's contour would cause a significant increase in damage to the work resulting from the defect.
Damaged blade detector for a rotary saw, in which the rotary saw is controlled by an automated machine controller for cutting work comprising:
- (a) a source of electromagnetic energy;
- (b) a wave guide assembly, the wave guide assembly guiding electromagnetic energy from the source to the blade of the saw;
- (c) a first detector for detecting electromagnetic energy generated by said source, said detector positioned adjacent to the saw axially opposite the wave guide assembly for receiving energy transmitted past the saw blade;
- (d) a support for the wave guide assembly to adjustably position the wave guide assembly with respect to the rotary saw;
- (e) a first register to provide an indication of modulation levels of the transmitted energy as detected by said detector beyond a predetermined limit of acceptability;
- (f) a stop control circuit in the automated machine controller for stopping the operation of the rotary saw in response to the indication from said register of modulation to a level beyond a predetermined limit of acceptability;
- (g) a second detector for detecting electromagnetic energy receiving portions of said energy which are reflected from the saw blade and received through the wave guide assembly;
- (h) a second register to provide an indication of modulation of the reflected energy, as detected by the second detector, beyond a predetermined limit of acceptability;
- and
- (i) the stop control circuit stopping the operation of the rotary saw in response to the indication of modulation of the reflected energy beyond a predetermined limit of acceptability.
Dependencies are inferred from the claim text.