Process for preparing iridium oxide film
AssigneeAgency of Industrial Science and Technology
InventorYoshiyuki Sato
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Abstract
The present invention provides a process for preparing an iridium oxide film which comprises evaporating iridium and carbon by electron beam or sputtering to prepare an iridium-carbon composite film, heating said composite film in an oxidizing atmosphere to form a thermally oxidized iridium oxide film, and continuously applying an alternating potential to said iridium oxide film in an aqueous solution to conduct electrolytic oxidation.
Claims4
A process for preparing an iridium oxide film which comprises evaporating iridium and carbon by electron beam or sputtering to prepare an iridiumcarbon composite film, heating said composite film in an oxidizing atmosphere to form a thermally oxidized iridium oxide film, and continuously applying an alternating potential to said iridium oxide film in an aqueous solution to conduct electrolytic oxidation.
Dependencies are inferred from the claim text.