Valve arrangement of microstructured components

A micro-structured valve arrangement, comprising:

• a basic body structure defining a flow path having an opening;
• an actuation member connected to said basic body so as to be supported in a rest position, spaced away from said opening and supported in an extended position, disposed over said opening:
• actuating drive means connected to said actuation member for moving said actuation member from said rest position to said extended position;
• and, holding means independent of said actuation drive means for retaining said actuation member in said extended position, said holding means comprising a first condenser plate connected to said actuation member and a second condenser plate defined by said valve body, said condenser plates being actuatable to generate a voltage difference to generate a holding force.

A micro-structured valve arrangement, comprising:

• a basic body structure defining a flow path having an opening;
• an actuation member connected to said basic body so as to be supported in a rest position, spaced away from said opening and supported in an extended position, disposed over said opening:
• actuating drive means connected to said actuation member for moving said actuation member from said rest position to said extended position;
• and, holding means independent of said actuation drive means for retaining said actuation member in said extended position, said actuating drive means comprising said actuation member as a first layer and a second layer said layers being heatable by means of a heating element each layer having a different thermal expansion coefficients, an electrical condenser serving as said holding device comprising an electriclly conductive condenser layer disposed on said actuation member facing the flow path opening and said basic body being formed of silicon.