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AssigneeIBM Corporation
InventorsJohn M. Lauffer, Richard A. Schumacher
Estimating the term…
Disclosed is a multilayer circuit package having a buried thin film capacitor. The circuit package includes at least a power core, a ground core, a first signal core, a second signal core, and the integral, buried, thin film capacitor. The integral, buried, thin film capacitor serves to capacitively couple the first and second signal cores. Structurally, the first signal core includes at least one first wire that terminates in at least one first electrode, while the second signal core includes at least one second wire that terminates in at least one second electrode. At least a portion of the first electrode overlays at least a portion of the first electrode overlays at least a portion of the second electrode and is separated therefrom by a thin film of a dielectric material. The first electrode, the second electrode, and the thin film of dielectric material define the integral buried capacitor. The thin film capacitor is prepared by thin film methodology, with epitaxial deposition of the dielectric.
A multilayer microelectronic circuit package including:
A multilayer microelectronic circuit package including:
A multilayer microelectronic circuit package including:
A method of fabricating a multilayer circuit package comprising a first signal core, a second signal core, and integral buried thin film capacitor means capacitively coupling said first and second signal cores, which method comprises:
Dependencies are inferred from the claim text.