Mold with hydrogenated amorphous carbon film for molding an optical element
AssigneeCanon Kabushiki Kaisha
InventorsKiyoshi Yamamoto, Keiji Hirabayashi, Noriko Kurihara, Yasushi Taniguchi, Keiko Ikoma
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Abstract
This specification discloses a mold for use for press-molding an optical element, characterized in that at least the molding surface of a mold base material is coated with an a-C:H film containing 5-40 atom % of hydrogen therein and having a film density of 1.5 g/cm.sup.3 or more. Other mold coating films also disclosed are a hydrogenated amorphous carbon film with an intermediate carbide layer between the film and the molding surface, and a hard carbon film containing 0-5 atom % of hydrogen therein and having a spin density of 1.times.10.sup.18 spin/cm.sup.3 or less and a film densisy of 1.5 g/cm.sup.3 or more.
Claims6
A mold for press-molding an optical element formed of glass comprising a pair of molding members, each molding member comprising a mold base and a glass contacting, hydrogenated amorphous carbon film thereon, said glass contacting film having an inner surface interfacing with said mold base and an outer surface for contacting said glass, wherein the hydrogen content of said glass contacting film decreases from a maximum concentration at the inner surface of said glass contacting film to a minimum concentration at said outer surface for contacting said glass.
A mold for press-molding an optical element, said mold comprising a pair of molding members, each of said molding members comprising, in sequence, (a) a mold base, (b) an intermediate layer comprising a carbide of an element of said mold base and (c) an outer coating of a hydrogenated amorphous carbon film for contacting a heated glass material.
A mold for press-molding an optical element said mold comprising a pair of molding members, each of said molding members comprising, in sequence, (a) a mold base, (b) an intermediate layer comprising a carbide of an element of said mold base and hydrogenated amorphous carbon and (c) an outer layer of a hydrogenated amorphous carbon film for contacting a heated glass material.
Dependencies are inferred from the claim text.