Polishing plate
AssigneeLam-Plan S.A.
InventorGeorges H. G. Broido
Life of this patent
Estimating the term…
Abstract
A polishing plate wherein the arcs cut in the soft parts by a circle whose radius is equal to approximately half that of the disk and whose center is at a distance from that of the disk equal to half the radius of the disk have a length between 0.5 and 5 mm.
Claims15
A circular polishing plate for use in conjunction with an abrasive suspension and having a center a radius and a plane surface on which appear flush soft and hard parts, wherein more than half of arcs cut in the soft parts by any one of a plurality of imaginary circles, whose radii are equal to 9/20ths of the radius of the plate and whose centers are at a distance from that of the plate equal to half the radius of the plate, have a length between 0.5 and 8 mm and wherein the hard parts are not abrasive.
A circular polishing plate used in conjunction with an abrasive suspension, said polishing plate having a center, a radius and a plane surface on which appear flush soft and hard parts, said soft and hard parts being non-abrasive with respect to said abrasive suspension, wherein more than half of arcs cut in the soft parts by any one of a plurality of imaginary circles, whose radii are equal to 9/20ths of the radius of the plate and whose centers are at a distance from that of the plate equal to half the radius of the plate, have a length between 0.5 and 8 mm.
Dependencies are inferred from the claim text.