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US 5,021,399 AGranted
Spray pyrolysis process for preparing superconductive films
AssigneeMicroelectronics and Computer Technology Corporation
InventorsHsyh-Min Hsu, Ian Y. K. Yee
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Abstract
An improved method for preparing high temperature Bi-Sr-Ca-Cu-O superconductive films utilizing spray pyrolysis. The method can further include an additional annealing step to improve the electrical transport properties.
Claims23
A spray pyrolysis method for preparing thin superconductive film, comprising the steps of:
- (a) preparing a spray pyrolysis solution comprising Bi,Sr,Ca and Cu metals in a solvent;
- (b) heating a substrate to a first temperature;
- (c) spraying said solution onto said heated substrate to form a film thereon;
- (d) heating said film and substrate to a second temperature of about 700.degree.-825.degree. C., said second temperature being higher than said first temperature;
- (e) heating said film and substrate to a third temperature of about 870.degree.-890.degree. C. to melt said film;
- (f) once said film and substrate reach said third temperature, further heat treating said film and substrate at a fourth temperature of about 840.degree.-860.degree. C.;
- and
- (g) cooling said film and substrate to ambient temperature.
5 more elements
A spray pyrolysis method for preparing thin superconductive films, comprising the steps of:
- (a) preparing a spray pyrolysis solution comprising Bi, Sr, Ca and Cu metals and a fluxing agent in a solvent;
- (b) heating a substrate to a first temperature;
- (c) spraying said solution onto said heated substrate to form a film thereon;
- (d) heating said film and substrate to a second temperature of about 700.degree.-825.degree. C., said second temperature being higher than said first temperature;
- (e) heating said film and substrate at a third temperature of about 840.degree.-860.degree. C.;
- and
- (f) cooling said film and substrate to ambient temperature.
4 more elements
A spray pyrolysis method for preparing thin superconductive films, comprising the steps of:
- spraying a spray pyrolysis solution comprising Bi, Sr, Ca and Cu metals in a solvent onto a heated substrate to form a film thereon;
- and
- heating said film and substrate to melt said film.
Dependencies are inferred from the claim text.