Raster scan control system for a charged-particle beam

A method of scanning a target area with a charged-particle beam comprising the steps of:

• (a) generating a charged-article beam having a first energy;
• (b) directing said beam through a pair of magnets having orthogonally oriented magnetic fields, each magnet having a coil associated therewith;
• (c) generating a sweeping magnetic field with a first of said magnets by energizing its coil with a first current having an increasing amplitude to sweep the magnetic field in one direction and with a decreasing amplitude to sweep the magnetic field in the other direction, said sweeping magnetic field causing said beam to sweep back and forth across the target area in one direction;
• (d) generating a stair-stepped magnetic field with a second of said magnets by energizing its coil with a second current having a stair-stepped waveform, said stair-stepped waveform causing said second current to assume a first fixed value for a first prescribed period of time, stepping a prescribed amount to a second fixed value, assuming said second fixed value for a second-prescribed period of time, and so on, said stair-stepped magnetic field causing said beam to step across the target area in a direction orthogonal to the sweep direction;
• and
• (e) synchronizing the delivery of said first and second currents to the coils of said first and second magnets so that the first current is increasing in amplitude during the prescribed period of time when the second current assumes one of the fixed values in its stair-stepped waveform, and so that the first current is decreasing in amplitude during the next prescribed period of time when the second current assumes the next fixed value in its stair-stepped waveform;
• whereby said sweeping and stair-stepped magnetic fields combine to steer the beam across the target area following a controlled raster scan pattern.

A method of steering a charged-particle beam of a beam delivery system along a prescribed raster scan pattern at a target site lying in an X-Z plane, said beam delivery system including a nozzle through which the beam passes prior to reaching the target site, said nozzle including fast and slow scanning electromagnets positioned within said nozzle so as to create X-Z orthogonal magnetic fields therein, each of said magnetic fields interacting with said beam in a way that causes said beam to be deflected in an X or Z direction by an amount proportional to the strength of the magnetic field, said method comprising the steps of:

• (a) applying a first slow scan electrical current to the slow scan electromagnet and a first fast scan electrical current to the fast scan electromagnet, said first slow scan current creating a slow scan magnetic field that steers the beam in a Z direction on the target site to a desired Z.sub.10 coordinate, and said first fast scan current creating a fast scan magnetic field that steers the beam in an X direction to a desired X.sub.10 coordinate, said X.sub.10 and Z.sub.10 coordinates comprising a first sweep start point (X.sub.10, Z.sub.10);
• (b) maintaining the first slow scan current in the slow scan magnet for a first period of time;
• (c) ramping the electrical current in the fast scan electromagnet from said first fast scan electrical current to a second fast scan electrical current over said first period of time, said ramping of electrical current creating a sweeping fast scan magnetic field that steers the beam in an X direction from said first sweep start point (X.sub.10, Z.sub.10) to a first sweep end point (X.sub.11, Z.sub.10), said first sweep end point being a prescribed distance from said first sweep start point (X.sub.11 -Z.sub.10), said prescribed distance being determined by the duration of said first period of time and the slope of said ramping electrical current;
• (d) altering the fast and slow scan electrical currents, as required, from the values existing at the end of said first period of time to whatever values are required to steer the beam from the first sweep end point (X.sub.11, Z.sub.10) to a second sweep start point (X.sub.20, Z.sub.20);
• (e) maintaining the value of current in the slow scan magnet existing after performing the previous step for a second period of time;
• (f) ramping the electrical current in the fast scan electromagnet from the value existing after reaching the most recent sweep start point to a new value over said second period of time, said ramping having a slope opposite that performed in the previous sweep, said new value being that value required to steer the beam from the second sweep start point (X.sub.20, Z.sub.20) to a second sweep end point (X.sub.21, Z.sub.20);
• (g) repeating steps (d) through (f), as required, incrementing the modifiers "first" to "second", "second" to "third", "third" to "fourth", and so on, in order to move the beam from an nth sweep end point (X.sub.n1, Z.sub.n10), where n is an integer, to the next sweep start point (X.sub.(n+1)0, Z.sub.(n+1)0), and from an (n+1)th sweep start point (X.sub.(n+1)0, Z.sub.(n+1)0) to the (n+1)th sweep end point (X.sub.(n+1)1, Z.sub.(n+1)1), until the target site has been covered by the respective sweeps of said beam.

A raster scan control system for a charged-particle beam delivery system providing precise control of large currents driving an inductive load, the beam delivery system comprising:

• a nozzle through which a charged-particle beam passes prior to being directed to a target, the nozzle including fast and slow sweep scan electromagnets that cooperate to generate a sweeping magnetic field that steers the beam along a desired raster scan pattern at the target, the electromagnets being driven by large currents from a raster scan control system;
• a raster scan control system including fast and slow power amplifiers for delivering the large currents to the fast and slow electromagnetics, respectively;
• a programmable raster generator for providing the fast and slow power amplifiers with raster scan signals that define a desired raster pattern for the charged-particle beam;
• monitoring means for monitoring the magnetic field generated by the electromagnets;
• sensing means for sensing the large currents;
• feedback means responsive to the monitoring means and the sensing means for controlling the magnetic field and large currents;
• out of tolerance means for automatically causing the power amplifiers to steer the beam away from the target upon detection of an out of tolerance event in the system;
• and
• a power supply for delivering power to the power amplifiers.