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AssigneeSumitomo Electric Industries, Ltd.
InventorsJun Shioya, Yoichi Yamaguchi, Akira Mizoguchi, Noriyuki Yoshida, Kenichi Takahashi, Kenji Miyazaki, Satoshi Takano, Noriki Hayashi
Estimating the term…
A thin film of an oxide superconductor having a homogeneous composition and less oxygen defects is produced by independently vaporizing onto a substrate at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and one material selected from the group consisting of Cu and its compounds and irradiating the substrate with oxygen ions and depositing the vaporized materials together with oxygen on the substrate to form the thin film of the oxide superconductor.
A method for producing a thin film of an oxide superconductor comprising independently vaporizing at least one first material selected from the group consisting of Y, lanthanides and their compounds, at least one second material selected from the group consisting of Ca, Sr and Ba and their compounds, and one third material selected from the group consisting of Cu and its compounds, ionizing the vaporized materials and irradiating a substrate with oxygen ions to deposit the vaporized materials together with oxygen on the substrate to form the thin film of the oxide superconductor.
Dependencies are inferred from the claim text.