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AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, Duncan W. Brown
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A scavenger for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, comprising (i) an inert inorganic support, and (ii) an active scavenging species on the support, formed by deposition thereon of an organometallic precursor and pyrolysis thereof at a selected elevated temperature. The organometallic precursor is an alkyl metal compound comprising a metal of Group IA, IIA, and/or IIIA, wherein the pyrolysis temperature may range from about 150.degree. C. to about 250.degree. C., depending on the specific alkyl metal compound employed as the precursor. Also disclosed are: a corresponding method of making the scavenger; a process for purifying inert gases by contacting same with the scavenger; and a vessel containing a bed of the scavenger, useful as an apparatus for purifying inert gases.
A process for purifying inert gases to remove Lewis acid and oxidant impurities therefrom, comprising contacting said inert gas mixture with a scavenger characterized by a water and oxygen removal capacity exceeding 5 liters of gaseous water and/or oxygen per liter of bed of the scavenger, said scavenger comprising:
An apparatus for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, comprising:
A process for purifying an inert gas mixture to remove Lewis acid and oxidant impurities therefrom, comprising contacting said inert gas mixture with a scavenger comprising:
Dependencies are inferred from the claim text.