Sealing glass compositions
AssigneeVLSI Packaging Materials, Inc.
InventorsLeo Finkelstein, Maurice E. Dumesnil, Richard R. Tetschlag
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Abstract
Fluid, stable glasses useful for low-temperature sealing applications are made by adding jointly bismuth oxide, zinc oxide, phosphorus pentoxide, titania and/or zirconium oxide to the lead oxide vanadium oxide binary. The phosphorus pentoxide may be replaced partially or entirely with niobium pentoxide and/or tantalum oxide. Sealing glass compositions comprising these low-melting lead-vanadia glasses in powder form and refractory fillers of lower thermal expansion for use in hermetically sealing semiconductor devices in ceramic packages are disclosed. Group V metal oxides, particularly niobium-containing oxides, are preferred fillers. Silver metal is a preferred filler for making die-attach compositions.
Claims45
A low-melting glass composition comprising, in weight percent calculated on an oxide basis:
- (a) PbO:
- 35-50%
- (b) V.sub.2 O.sub.5 :
- 35-50%
- (c) Bi.sub.2 O.sub.3 :
- 0.1-6%
- (d) P.sub.2 O.sub.5, Nb.sub.2 O.sub.5, Ta.sub.2 O.sub.5, or combinations thereof:
- 0.1-8%
- (e) ZnO, MgO, CaO, BaO, SrO, or combinations thereof:
- 0.1-5%
- (f) TiO.sub.2, ZrO.sub.2, or combinations thereof:
- 0.1-5%
- wherein the combined weight percent of (c)+(d)+(e)+(f) is in the range of 0.4-24%.
A low-melting glass composition comprising, in weight percent calculated on an oxide basis:
- ______________________________________ (a) PbO 35-45% (b) V.sub.2 O.sub.5 35-45% (c) ZnO 2-4% (d) Bi.sub.2 O.sub.3 3-5% (e) Nb.sub.2 O.sub.5 3-5% (f) TiO.sub.2 0-4% (g) ZrO.sub.2 0-4% (h) P.sub.2 O.sub.5 0-4% (i) B.sub.2 O.sub.3 0-2% (j) CoO 0-3% (k) F 0-1% ______________________________________
- wherein the combined weight percent of (f)+(g) is in the range of 0.1-4%.
Dependencies are inferred from the claim text.