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US 5,010,737 AGranted
Multi-headed cryopump apparatus
AssigneeAisin Seiki Kabushiki Kaisha
InventorsNobuo Okumura, Atsuyuki Miura
Life of this patent
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Abstract
A multi-headed cryopump apparatus includes a plurality of cryopumps driven by a common compressor. There is a valve system between each cryopump and the compressor. A motor is provided for driving each cryopump, and a sensor is provided for detecting the amount of current supplied to each motor. By use of a control system, which accepts input from the sensors, the valve systems are controlled such that they operate in turn with a constant cycle.
Claims3
A multi-headed cryopump apparatus comprising:
- a plurality of cryopumps;
- a common compressor connected to each of the plurality cryopumps;
- a plurality of valve means each of which is interposed between each cryopump and the compressor;
- a plurality of motors for driving a corresponding cryopump;
- a plurality of current detecting sensors for detecting the current supplied to a corresponding motor;
- and
- a control unit for controlling the operation of each valve means on the basis of the result of each current detecting sensor in such manner that the plural valve means operate in turn with a constant cycle.
4 more elements
Dependencies are inferred from the claim text.