Back to results
US 5,008,535 AGranted
Energy analyzer and spectrometer for low-energy electrons
AssigneeU.S. Philips Corporation
InventorGerardus G. P. Van Gorkom
Life of this patent
Estimating the term…
Abstract
An energy analyzer for Auger electrons can be simply formed by means of a glass tube provided with a helical layer of ruthenium oxide. The loss in energy resolution which occurs upon detection outside the focal plane can be electronically compensated for by detecting the electrons by means of a segmented anode.
Claims28
An energy analyzer for low-energy electrons comprising
- (a) an electrically insulating tubular section having rotational symmetry disposed about an analyzer space, a homogeneous and uniform electrical field being generated in said analyzer space, said analyzer space including an entrance aperture and an exit aperture, said exit aperture being an annular slot,
- (b) a helical electrical resistance layer disposed at an inner side of said tubular section, said helical electrical resistance layer being coaxial with said tubular section,
- (c) an electrical conductor disposed at ends of said tubular section, and
- (d) detector means for detecting electrons emanating from said exit aperture, said detector means including an annular, flat channel plate arranged opposite to said exit aperture, said annular, flat channel plate being concentric with said exit aperture,
- wherein said energy analyzer comprises an anode, said anode including a number of anode rings electrically insulated from one another, said number of anode rings being electrically interconnected in a two-by-two fashion.
2 more elements
An energy analyzer for low-energy electrons comprising
- (a) an electrically insulating tubular section having rotational symmetry disposed about an analyzer space, a homogeneous and uniform electrical field being generated in said analyzer space, said analyzer space including an entrance aperture and an exit aperture, said exit aperture being an annular slot,
- (b) a helical electrical resistance layer disposed at an inner side of said tubular section, said helical electrical resistance layer being coaxial with said tubular section,
- (c) an electrical conductor disposed at ends of said tubular section, and
- (d) detector means for detecting electrons emanating from said exit aperture, said detector means including an annular, flat channel plate arranged opposite to said exit aperture, said annular, flat channel plate being concentric with said exit aperture,
- wherein said energy analyzer comprises an anode, said anode including a matrix of mutually electrically insulated anode elements.
2 more elements
An energy analyzer for low-energy electrons comprising
- (a) an electrically insulating tubular section having rotational symmetry about a symmetry axis, said tubular section being disposed about an analyzer space, a homogeneous and uniform electrical field being generated in said analyzer space, said analyzer space including an entrance aperture and an exit aperture, said exit aperture being an annular slit coaxial with said tubular section, said annular slit being provided with a first fine-meshed gauze
- (b) a helical electrical resistance layer disposed at an inner side of said tubular section, said helical electrical resistance layer being coaxial with said tubular section,
- (c) an electrical conductor disposed at ends of said tubular section,
- (d) detector means for detecting electrons emanating from said exit aperture, said detector means having a detection entrance face situated in a focal plane coinciding with a part of an envelope of a straight circular cone having an apex on said symmetry axis, such that second order focussing occurs in said focal plane for equal energy electrons,
- (e) a second fine-meshed gauze disposed in said detection entrance face, said second fine-meshed gauze having a potential equaling a potential at an area of said exit aperture, and
- (f) intensifier means cooperating with said detector means for carrying a potential higher than that of said second fine-meshed gauze, said intensifier means including a flat, annular channel plate coaxial with said tubular section,
- wherein said energy analyzer comprises an anode cooperating with said intensifier means,
- said anode being an electrically insulating substrate including a number of metal rings coaxial with said tubular section, said number of metal rings being electrically insulated from one another.
5 more elements
An energy analyzer for low-energy electrons comprising
- (a) an electrically insulating tubular section having rotational symmetry about a symmetry axis, said tubular section being disposed about an analyzer space, a homogeneous and uniform electrical field being generated in said analyzer space, said analyzer space including an entrance aperture and an exit aperture, said exit aperture being an annular slit coaxial with said tubular section, said annular slit being provided with a first fine-meshed gauze
- (b) a helical electrical resistance layer disposed at an inner side of said tubular section, said helical electrical resistance layer being coaxial with said tubular section,
- (c) an electrical conductor disposed at ends of said tubular section,
- (d) detector means for detecting electrons emanating from said exit aperture, said detector means having a detection entrance face situated in a focal plane coinciding with a part of an envelope of a straight circular cone having an apex on said symmetry axis, such that second order focussing occurs in said focal plane for equal energy electrons,
- (e) a second fine-meshed gauze disposed in said detection entrance face, said second fine-meshed gauze having a potential equaling a potential at an area of said exit aperture, and
- (f) intensifier means cooperating with said detector means for carrying a potential higher than that of said second fine-meshed gauze, said intensifier means including a flat, annular channel plate coaxial with said tubular section,
- wherein said energy analyzer comprises an anode cooperating with said intensifier means,
- said anode including a matrix of mutually electrically insulated anode elements.
5 more elements
Dependencies are inferred from the claim text.