Method of manufacturing a thin film EL device by multisource deposition method
AssigneeKabushiki Kaisha Komatsu Seisakusho
InventorsTakashi Nire, Takehito Watanabe
Life of this patent
Estimating the term…
Abstract
The disclosure describes a thin film EL device including a luminescent layer made of column polycrystals formed by independently evaporating luminescent host material and an activator and then combining the evaporated substances on a substrate. Electrons in the luminescent layer which are accelerated by an electric field applied from the outside efficiently collide against the activator without being intercepted by interfaces between crystalline particles. The thin film EL device of the present invention can be used for display, illumination, writing, reading out, and erasure of signals of photo-recording mediums.
Claims4
A method of manufacturing a thin film EL device on a substrate comprising the steps of:
- forming a transparent electrode on said substrate;
- forming a first insulating layer on said transparent electrode;
- forming a luminescent layer having column polycrystals by a multi-source deposition method comprising steps of providing first elements constituting a host material of said luminescent layer evaporated from respectively separated evaporating sources, and a second element constituting an activator of said luminescent layer, and deposition said first and second elements in such a manner that said first elements are combined with each other and said second element is doped into said combined first elements on said first insulating layer;
- forming a second insulating layer on said luminescent layer;
- and
- forming a back electrode on said second insulating layer.
Dependencies are inferred from the claim text.