Electrodes for ceramic oxide capacitors
AssigneeNational Semiconductor Corporation
InventorShepherd, William H.
Life of this patent
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Abstract
Electrodes composed of ruthenium iridium, osmium, or rhodium and the electrically conductive oxides of these metals are particularly well-suited to use in electrical ceramic oxide devices because of the low resistivity of the oxides and the stability of the oxides under the processing conditions necessary to optimize performance of electrical ceramic oxide materials. Such electrodes may be used with ceramic oxide capacitors, including ceramic oxide capacitors found in microelectronic devices.
Claims24
An electrical ceramic oxide capacitor comprising:
- a first electrode including a first body of material selected from the group consisting of ruthenium oxide, iridium oxide, osmium oxide, and rhodium oxide;
- a second electrode;
- and
- an electrical ceramic oxide dielectric material disposed between said first and said second electrodes.
A microelectronic device including an electrical ceramic oxide capacitor comprising:
- a first electrode, said first electrode including a first body of material selected from the group consisting of ruthenium oxide, iridium oxide, osmium oxide, and rhodium oxide;
- a second electrode;
- an electrical ceramic oxide dielectric material disposed between and in electrical contact with said first and said second electrodes, thereby forming a capacitor;
- and
- a semiconductor substrate supporting said first electrode, said second electrode, and said electrical ceramic oxide dielectric material.
A method for forming a microelectronic device having an electrical ceramic oxide capacitor, comprising:
- (a) providing a semiconductor substrate for support;
- (b) forming a first electrode supported upon said substrate, said electrode including a first body of material selected from the group consisting of ruthenium, iridium, osmium, rhodium, ruthenium oxide, iridium oxide, osmium oxide, and rhodium oxide;
- (c) forming a second electrode supported upon said substrate;
- and
- (d) forming a dielectric body of electrical ceramic oxide dielectric material supported upon said substrate, said dielectric body disposed between and in electrical contact with said first and said second electrodes.
Dependencies are inferred from the claim text.