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US 4,992,245 AGranted
Annular heated fluidized bed reactor
AssigneeAdvanced Silicon Materials LLC
InventorsRichard A. Van Slooten, Ravi Prasad
Life of this patent
Estimating the term…
Abstract
An improved fluidized bed reactor characterized by a peripheral heating zone annulus containing particles of the fluidized bed. The particles are heated in the heating zone annulus and transferred to an inner reaction zone. The particles enter the heating zone annulus at an upper inlet and exit the heating zone annulus at a lower outlet. The heated particles supply heat to the inner reaction zone.
Claims14
A heated fluidized bed reactor consisting essentially of:
- (a) a reaction vessel;
- (b) means located within the reaction vessel defining a peripheral heating zone annulus surrounding an inner fluidized bed reaction zone which annulus is defined by an inner wall and an outer heating zone wall, said annulus includes an annular space between said walls, an upper annulus end and a lower annulus end, the heating zone annulus laterally confining particles from the fluidized bed in an incipient fluidized state, the annular space of the heating zone annulus respectively defining an upper inlet at the upper annulus end for the entry of the particles from the fluidized bed and a lower outlet at the lower annulus end for introducing heated particles into the inner reaction zone, the heated particles of the heating zone annulus entering the inner reaction zone through the lower outlet of the heating zone annulus supplying heat to the inner reaction zone;
- (c) means defining the inner fluidized bed reaction zone;
- (d) heating means for supplying heat to the outer heating zone wall that partially defines the peripheral heating zone annulus;
- and
- (e) a fluidizing gas means for fluidizing the particles.
3 more elements
A heated fluidized bed reactor used in the production of polycrystalline silicon by the pyrolysis of silane containing gases consisting essentially of:
- (a) a reaction vessel including a lower inlet for silane containing gas, a lower outlet for the removal of the silicon product particles, and an upper outlet for the removal of the unreacted silane containing gas and the gaseous by-products of the pyrolysis of the silane containing gas;
- (b) means located within the reaction vessel defining a peripheral heating zone annulus surrounding an inner fluidized bed reaction zone which annulus is defined by an inner wall and an outer heating zone wall, said annulus includes an annular space between said walls, an upper annulus end and a lower annulus end, the peripheral heating zone annulus laterally confining silicon particles in an incipient fluidized state, the annular space of the heating zone annulus respectively defining an upper inlet at the upper annulus end for the entry of silicon particles from the fluidized bed and a lower outlet at the lower annulus end for introducing heated silicon particles into an inner reaction zone, heat being supplied to the inner reaction zone by the heated silicon particles entering the inner reaction zone through the lower outlet of the heating zone annulus;
- (c) heating means for supplying heat to the outer heating zone wall that partially defines the peripheral heating zone annulus;
- and
- (d) a fluidizing gas means for fluidizing the particles.
2 more elements
A heated fluidized bed reactor for the production of polycrystalline silicon by the pyrolysis of silane containing gases consisting essentially of:
- (a) a cylindrical reaction vessel, including a lower inlet for silane containing gas, a lower outlet for the removal of silicon product particles, an upper outlet for the removal of the silane containing gas and the gaseous by-products of the pyrolysis of the silane containing gas;
- (b) an inner reaction zone wall having a diameter of about 30 cm disposed concentrically within the cylindrical reaction vessel and surrounding an inner reaction zone;
- (c) an outer heating zone wall having a diameter of about 41 cm forming a peripheral heating zone annulus between the inner reaction zone wall and the outer heating zone wall, the heating zone annulus laterally confining silicon particles in an incipient fluidized state, the heating zone annulus including an upper inlet for the entry of silicon particles and a lower outlet, including a pulsed gas jet, for introducing heated silicon particles into the inner reaction zone, the heated silicon particles that enter the inner reaction zone from the lower outlet of the heating zone annulus supply heat to the inner reaction zone;
- and
- (d) heating means for supplying heat to the heating zone annulus through the outer heating zone wall, the temperature of the particles of the heating zone annulus ranging from about 550.degree. C. to about 1000.degree. C.
2 more elements
Dependencies are inferred from the claim text.