Micro secondary electron multiplier
AssigneeKernforschungszentrum Karlsruhe GmbH
InventorsWolfgang Ehrfeld, Herbert Moser, Dietrich Munchmeyer
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Abstract
A micro secondary electron multiplier or an array thereof employs discrete dynodes which are microstructured and applied to an insulating substrate plate. The substrate plate is provided with electrical conductor paths for the connection of the dynodes. The dynodes can be made using a technique such as X-ray depth lithography-galvanoplasty (the LIGA technique). The micro secondary electron multiplier or an array of such multipliers is extremely small and sensitive, and has a high time resolution. Furthermore there is considerable flexibility in positioning the multipliers of an array.
Claims27
A secondary electron multiplier, comprising:
- an insulating substrate plate having a surface;
- a plurality of discrete dynodes attached to the surface of the substrate plate, each dynode including at least a first layer of a first metal and a second layer of a second metal this is different from the first metal, with the first and second layers being disposed at different distances from the surface of the substrate plate;
- and
- electrical conductor paths attached to the substrate plate, the electrical conductor paths being connected to the dynodes.
An array of secondary electron multipliers, comprising:
- an insulating substrate plate having a surface;
- a plurality of dynode groups, each dynode group including a respective plurality of discrete dynodes which are attached to the surface of the substrate plate, each dynode including at least a first layer of a first metal and a second layer of a second metal that is different from the first metal, with the first and second layers being disposed at different distances from the surface of the substrate plate;
- electrical conductor paths attached to the substrate plate, each electrical conductor path being connected to at least one dynode;
- means for defining a separate signal input port for each dynode group;
- and
- means for defining a separate signal output port for each dynode group.
Dependencies are inferred from the claim text.