Apparatus for transmitting heat under vacuum by grains
AssigneeCommissariat a l'Energie Atomique
InventorsBernard Bechevet, Claude Calvat, Bernard Rolland, Bruno Valon
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Abstract
A heat transmission apparatus is formed between a thermal source (12) and an object (21) in a vacuum enclosure (1) by placing in a cavity defined by a heat emission wall (20) and the object (21), a granular material (30) which adapts to the thermal expansions, while permitting heating by conductivity under very good conditions. Possible application to the manufacture of semiconductors and the crystallization of thin films.
Claims5
Apparatus for transmitting heat from a thermal source to an object, the apparatus comprising an enclosure, means for creating vacuum in the enclosure, a circumferential support in the enclosure for receiving the object, means for clamping an edge of the object on the support, the thermal source comprising a wall, wherein the wall, the support and the object when received on the support define a cavity, and the apparatus further comprises heat conducting balls which fill the cavity between the wall and the object.
Dependencies are inferred from the claim text.