Zinc oxyfluoride transparent conductor
AssigneePresident and Fellows of Harvard College
InventorRoy G. Gordon
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Abstract
Transparent, electrically conductive and infrared-reflective films of zinc oxyfluoride are produced by chemical vapor deposition from vapor mixtures of zinc, oxygen and fluorine-containing compounds. The substitution of fluorine for some of the oxygen in zinc oxide results in dramatic increases in the electrical conductivity. For example, diethyl zinc, ethyl alcohol and hexafluoropropene vapors are reacted over a glass surface at 400.degree. C. to form a visibly transparent, electrically conductive, infrared reflective and ultraviolet absorptive film of zinc oxyfluoride. Such films are useful in liquid crystal display devices, solar cells, electrochromic absorbers and reflectors, energy-conserving heat mirrors, and antistatic coatings.
Claims22
A compound of the formula ZnO.sub.1-x F.sub.x wherein x is in the range 0.001 to 0.1.
Process for making a compound of the formula ZnO.sub.1-x F.sub.x wherein x is in the range 0.001 to 0.1 comprising forming a vapor mixture of volatile zinc-containing, oxygen-containing and fluorine-containing compounds;
- and exposing the vapor mixture to a heated substrate to deposit a film of the compound on the substrate.
Dependencies are inferred from the claim text.