Method and apparatus for producing a layer of material from a laser ion source

An apparatus for producing a layer of diamond-like carbon on a substrate, comprising:

• a chamber having a window;
• means for creating a vacuum within the chamber;
• a laser disposed and selectably operable for directing a laser beam through the window into the chamber along a laser beam path of travel;
• a graphite target disposed within the chamber;
• lens means positioned along the laser beam path of travel to focus the beam on the graphite target,
• for ejecting a plume of carbon vapor from the target, and
• for ionizing a portion of the plume to create carbon ions;
• an accelerating grid disposed within the chamber and spaced from the graphite target, the grid being chargeable to a negative potential for separating the carbon ions with trailing free electrons from the plume and for moving the carbon ions and trailing free electrons along an ion path of travel from the target through the grid;
• a substrate disposed within the chamber along the ion path of travel, with the grid between and separate from the substrate and graphite target, for collecting the carbon ions for form a layer of diamond-like carbon on the substrate.

A method for producing a layer of material comprising the steps of:

• positioning a first target of first material in a chamber;
• creating a vacuum within the chamber enveloping the first target;
• directing a laser beam at the first target;
• focusing the laser beam on the first target;
• ablating a portion of the first target with the laser beam focused on the target to eject a plume of the first target material;
• ionizing part of the plume with the laser beam impacting the plume to create ions and trailing free electrons in the region of the plume;
• moving at least some of the ions and trailing free electrons from the region towards a charged potential within the chamber along an ion path of travel;
• positioning a substrate along the ion path of travel;
• and
• collecting the ions and trailing free electrons on the substrate to form a layer of material on the substrate.

An apparatus for producing a layer of material on a substrate comprising:

• a chamber;
• means for producing a vacuum within the chamber;
• first and second targets positioned within the chamber;
• means for producing a laser beam;
• means disposed relative to the first and second targets for directing a laser beam on each target to eject material and ionize at least a portion of the material;
• separation means disposed within the chamber and chargeable at an electrical potential for separating ions from the ejected material and for moving the ions and trailing free electrons along an ion path of travel from the targets;
• a substrate disposed within the chamber along the ion path of travel for collecting the ions to form a layer of material on the substrate.