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US 4,987,002 AGranted
Process for forming a crystalline diamond film
AssigneesKabushiki Kaisha Kenwood, Namiki Precision Jewel Co., Ltd.
InventorsMasakatu Sakamoto, Youichi Yaguchi, Hiroaki Toshima, Toshiroh Kotaki
Life of this patent
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Abstract
A crystalline diamond film is formed on a thin substrate. Energy is applied by a thermal plasma torch to a gas mixture to deposit carbon particles onto the substrate. The substrate is positioned on a pedestal with a cooling facility in which an intermediate layer of thermally conductive powder is interposed between the substrate and the pedestal.
Claims17
A crystalline diamond film forming process comprising the steps of:
- arranging a pedestal cooled with cooling facility during the film forming process;
- positioning a thin substrate on said pedestal with an intermediate layer which is interposed between the pedestal and the substrate, the intermediate layer comprising a thermally conductive powder;
- feeding a mixture of gas composed of argon, a hydrocarbon, and hydrogen to a thermal plasma generating means;
- and
- applying energy to the gas mixture via said thermal plasma generating means to produce decomposed carbon particles and depositing the carbon particles onto the substrate to form a crystalline diamond film.
2 more elements
A crystalline diamond film forming process comprising the steps of:
- arranging a pedestal;
- positioning a thin substrate on said pedestal with an intermediate layer which is interposed between the pedestal and the substrate, the intermediate layer comprising a thermally conductive powder;
- feeding a mixture of gas composed of argon, a hydrocarbon, and hydrogen to a thermal plasma generating means;
- applying energy to the gas mixture via said thermal plasma generating means to produce decomposed carbon particles and depositing the carbon particles onto the substrate to form a crystalline diamond film;
- and
- cooling said pedestal so that the temperature on the substrate surface is maintained in the rang of 800 to 1000 degrees centigrade.
3 more elements
Dependencies are inferred from the claim text.