Method for production of trichloromonosilane
AssigneeElkem a/s
InventorsKarl Forwald, Gunnar Schussler, Oyvind Sorli
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Abstract
The present application relates to a method for production of trichloromonosilane in a fluidized bed reactor by reaction of silicon powder and HCl at a temperature between 280.degree. and 300.degree. C. wherein silicon powder which has been produced by gas atomization of molten silicon is used. The gas atomized silicon powder has a preferred particle size between 1 and 1000 .mu.m.
Claims6
A method for producing trichloromonosilane in a fluidized bed reactor by reaction wherein a silicon powder and gaseous hydrochloric acid are reacted at a temperature between 280.degree. and 300.degree. C., the improvement comprising using a silicon powder produced by gas atomization of molten silicon, whereby the amount of non-reacted hydrochloric acid and silicon tetrachloride produced during the reaction is reduced.
A method for producing trichloromonosilane comprising:
- (a) producing a silicon powder by gas atomization of molten silicon;
- and
- (b) reacting said silicon powder with gaseous hydrochloric acid in a fluidized bed reactor at a temperature between 280.degree. and 300.degree. C. to produce said trichloromonosilane.
Dependencies are inferred from the claim text.