Method and device for cooling electron beam gun
OwnerJames L. Harper, Charles H. Hillinventors
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Abstract
A device and method for cooling the edge of a top plate which partially surrounds an evaporant pocket in an electron beam gun. The invention involves the passage of coolant through a channel in the top plate. The channel is substantially parallel to and close enough to the edge of the top plate so that re-evaporation of evaporant condensed on the edge of the top plate is substantially prevented.
Claims14
In an electron beam gun having a rotatable table partially covered by a top plate, said table having a plurality of evaporant pockets, said top plate having an inward edge partially surrounding a first of said pockets, so that said first pocket is upwardly exposed while the other pockets are covered, wherein the improvement comprises:
- a stream of coolant, said top plate having a channel for passing said coolant, said channel running longitudinally through said top plate adjacent and substantially parallel to said inward edge of said top plate, whereby said inward edge of said top plate is cooled by said coolant.
A process for cooling a top plate which covers an evaporant table in an electron beam gun, said table having a plurality of evaporant pockets, said top plate having an inward edge partially surrounding a first of said pockets allowing said first pocket to be upwardly exposed while the other pockets are covered, comprising the step of:
- passing coolant through a channel in said top plate, said channel running longitudinally through said top plate adjacent and substantially parallel to said inward edge of said top plate.
In an electron beam gun having a plate edge partially surrounding an evaporant pocket, wherein the improvement comprises:
- a stream of coolant, said plate having a channel substantially parallel to said plate edge.
A device for coating an object with material comprising:
- a means for producing a sweeping electron beam;
- a table having a first pocket for holding said material so that a surface of said material is upwardly exposed, said electron beam being directed at said surface of said material;
- a plate having an edge partially surrounding said first pocket,, said plate having a first channel running longitudinally and substantially parallel to said edge;
- a first coolant stream passing through said first channel of said plate for cooling said edge, whereby re-evaporation of material off of said edge is substantially prevented.
Dependencies are inferred from the claim text.