A method for separating chemical contaminants from contaminated feed materials comprising, subjecting the feed materials contaminated with chemical compounds to a temperature effective to volatilize the contaminants, but below incineration temperature, with substantially continuous removal of evolved vapors having chemically oxidizable compounds, for a period of time sufficient to effect a desired degree of separation of the contaminants from the feed materials, wherein the evolved vapors are catalytically oxidized in the presence of steam at gas phase conditions, to convert substantially all of the chemically oxidizable compounds, thereby producing a gaseous reaction product comprising substantially steam and incondensable gases.