Scanning laser microscope system and methods of use
AssigneeE. I. Du Pont de Nemours and Company
InventorsWilliam E. Wolf, Alfred Hirschle, Derrick P. Lattibeaudiere, Robert H. Livermore, Alan P. Stamford, John Taylor
Life of this patent
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Abstract
A scanning laser microscope system for assisting in the detection and characterization of fine details and structures of materials or other samples. The system can have means for enhancing light from the material to assist detection of anomalies, such as inclusions in the material and crystal lattice dislocations. The system can have means for enhancing fluorescent light emitted from the sample. The system can further have very precise means for processing signals representative of light detected from the material.
Claims105
A scanning laser microscope system for assisting in the characterization of an object, the system comprising:
- a first laser for producing a first linearly polarized, substantially collimated, single wavelength beam of light having an axis;
- means for scanning the beam in a raster scanning fashion in a first direction across a scanning plane of the object and in a second direction perpendicular to the first direction across the scanning plane of the object;
- means for enhancing light from the object by increasing contrast between anomalies and a remainder of the object;
- means for detecting light from the enhancing means and for generating electrical signals representative of the intensity of the detected light;
- and
- means for creating an image representative of the scanning plane of the object from the detected light.
A scanning laser microscope system comprising:
- an optical system for scanning a light beam in a raster scanning fashion on a scanning plane of a material;
- means for detecting the beam from the material and for generating signals representative of the intensity of the detected light;
- means for generating pixel clock signals representative of the position of the beam in a first direction on the scanning plane of the material;
- means for causing the position of the beam on the material scanning plane in a second direction perpendicular to the first direction to conform to a desired beam position;
- means for storing the detected light signals;
- means for providing control signals to the storing means based on the pixel clock signals in the first direction and the desired beam position in the second direction to synchronize the storing means such that the detected light signals are stored in storage locations corresponding to the position of the beam on the material scanning plane;
- and
- means for forming the stored signals into an image representative of the material scanning plane.
A scanning laser microscope system for assisting in the characterization of an object, the system comprising:
- a first laser for producing a first linearly polarized, substantially collimated, single wavelength beam of light having an axis;
- means for scanning the beam in a raster scanning fashion in a first direction across a scanning plane of the object and in a second direction perpendicular to the first direction across the scanning plane of the object, wherein the scanning means comprises:
- a rotor rotatable about a rotor axis and having a circumferential side with a plurality of reflective facets, the rotor positioned to receive the beam on one of the facets;
- means for rotating the rotor to cause the beam axis to scan in the first direction across the scanning plane of the object;
- first optical means for directing the beam axis from the rotor at varying angles of incidence to a first point;
- a planar mirror rotatable about a mirror axis perpendicular to the rotor axis and intersecting the point, the mirror positioned to receive the beam from the first optical directing means;
- a galvanometer connected to the planar mirror to cause the planar mirror to move about the mirror axis and to cause the beam axis to also scan in the second direction across the scanning plane of the object, thereby defining a raster light pattern in a plane perpendicular to the beam axis reflected from the planar mirror;
- second optical means for directing the beam axis from the mirror at varying angles of incidence to a second point;
- and
- a flat field apochromat objective lens positioned at the second point, the lens for receiving the beam from the second optical directing means and for focusing the beam to the scanning plane of the object;
- means for enhancing light from the object;
- means for detecting light from the enhancing means and for generating electrical signals representative of the intensity of the detected light;
- and
- means for creating an image representative of the scanning plane of the object from the detected light.
Dependencies are inferred from the claim text.