Detector for force and acceleration using resistance element

A force detector detecting three-dimensional components of force in a three-dimensional coordinate system expressed by three axes of X, Y and Z, comprising:

• resistance elements having a piezo resistance effect such that electric resistance of the elements varies due to mechanical deformation, and formed on a single crystal substrate, a first set of four resistance elements being formed along a first line which lies on a surface of the substrate, a second set of four resistance elements being formed along a second line which lies on said surface and is substantially perpendicular to said first line, and a third est of four resistance elements being formed along a third line which lies on said surface, and
• a strain generative body having a supporting portion connected to a part of said substrate and a working portion connected to another part of said substrate, wherein a displacement is made between said supporting portion and said working portion by adding force to said working portion, thus allowing said resistance elements to experience mechanical deformation on the basis of said displacement,
• wherein three bridges are formed to detect all of said components, a first bridge formed by said first set of resistance elements in such a way that, in the order of sequence of said elements along said first line, a first element is opposite to a third element and a second element is opposite to a fourth element, a second bridge being formed by said second set of resistance elements in such a way that a first element of the sequence of elements is opposite to a third element and a second element is opposite to a fourth element, and a third bridge being formed by said third set of resistance elements in such a way that a first element of the sequence of elements is opposite to a fourth element and a third element is opposite to a second element.

An acceleration detector detecting three-dimensional components of acceleration in a three-dimensional coordinate system expressed by three axes of X, Y, and Z, comprising:

• resistance elements having a piezo resistance effect such that electric resistance of the elements varies due to mechanical deformation, and formed on a single crystal substrate, and
• a strain generative body having a supporting portion connected to a part of said substrate and a working portion connected to another part of said substrate, wherein a displacement is made between said supporting portion and said working portion by adding force to said working portion, thus allowing said resistance elements to experience mechanical deformation on the basis of said displacement,
• a weight body connected to said working portion of said strain generative body, thus allowing said working portion to produce a displacement corresponding to an acceleration of said strain generative body,
• wherein a different set each comprising four resistance elements is provided for detecting the component of force along each of said three axes, respectively, and three bridges are formed each of which comprises a different one of said sets of resistance elements, thus to detect all of said three-dimensional components of acceleration.

An acceleration detector detecting three-dimensional components of acceleration in a three-dimensional coordinate system expressed by three axes of X, Y and Z, comprising:

• resistance elements having a piezo resistance effect such that electric resistance of the elements varies due to mechanical deformation, and formed on a single crystal substrate, a first set of four resistance elements being formed along a first line which lies on a surface of the substrate, a second set of four resistance elements being formed along a second line which lies on said surface and is substantially perpendicular to said first line, and a third set of four resistance elements being formed along a third line which lies on said surface, and
• a strain generative body having a supporting portion connected to a part of said substate and a working portion connected to another part of said substrate, wherein a displacement is made between said supporting portion and said working portion by adding force to said working portion, thus allowing said resistance elements to experience mechanical deformation on the basis of said displacement,
• a weight body connected to said working portion of said strain generative body, thus allowing said working portion to produce a displacement corresponding to an acceleration of said strain generative body,
• wherein three bridges are formed to detect all of said components, a first bridge formed by said first set of resistance elements in such a way that, in the order of sequence of said elements along said first line, a first element is opposite to a third element and a second element is opposite to a fourth element, a second bridge being formed by said second set of resistance elements in such a way that a first element of the sequence of elements is opposite to a third element and a second element is opposite to a fourth element, and a third bridge being formed by said third set of resistance elements in such a way that a first element of the sequence of elements is opposite to a fourth element and a third element is opposite to a second element.

An acceleration detector detecting two-dimensional components of acceleration in a two-dimensional coordinate system expressed by two axes of X and Y, comprising:

• resistance elements having a piezo resistance effect such that electric resistance of the elements varies due to mechanical deformation, and formed on a single crystal substrate, and
• a strain generative body having a supporting portion connected to a part of said substrate and a working portion connected to another part of said substrate, wherein a displacement is made between said supporting portion and said working portion by adding force to said working portion thus allowing said resistance elements to experience mechanical deformation on the basis of said displacement,
• a weight body connected to said working portion of said strain generative body, thus allowing said working portion to produce a displacement corresponding to an acceleration of said strain generative body,
• wherein two sets each comprising four resistance elements are provided for detecting the component of force along each of said two axes, respectively, and two bridges are formed each of which comprises a different one of said sets of said resistance elements, thus to detect both of said two-dimensional components of acceleration.