Process control interface system for managing measurement data

In a method of using a programmed digital computer to control the measurement, storage and analysis of a multiplicity of measurements, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements and communicating the resulting measurement values to said computer, the steps of:

• defining a test data structure which denotes a set of measurements that can be performed by said apparatus;
• said test data structure denoting a hierarchy of said set of measurements in which said measurements are divided into a multiplicity of groups of said measurements, and a plurality of said groups of measurements include a plurality of subgroups of said measurements;
• establishing a multiplicity of measurement definition data structures;
• denoting in each said measurement definition data structure a hierarchically arranged mask corresponding to said hierarchy denoted in said test data structure, said mask denoting selected ones of said groups of said measurements denoted in said test data structure, and selected ones of said subgroups of said measurements;
• selecting one of said measurement definition data structures;
• performing the set of measurements denoted by said selected measurement definition data structure, said performing step including the step of performing only those groups and subgroups of measurements denoted as selected by said selected measurement definition data structure;
• and
• storing measurement values conveyed by said apparatus to said computer in said data storage means;
• wherein only measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.

In a method of using a programmed digital computer to control the measurement, storage and analysis of a multiplicity of measurements, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements and communicating the resulting measurement values to said computer, the steps of:

• defining a test data structure which denotes a set of measurements that can be performed by said apparatus;
• said test data structure denoting a hierarchy of said set of measurements in which said measurements are divided into a multiplicity of groups of said measurements, and a plurality of said groups of measurements include a plurality of subgroups of said measurements;
• establishing a multiplicity of measurement definition data structure;
• denoting in each said measurement definition data structure a hierarchically arranged mask corresponding to said hierarchy denoted in said test data structure, said mask denoting selected ones of said groups of said measurements denoted in said test data structure, selected ones of said subgroups of said measurements, and selected ones of said individual measurements;
• selecting one of said measurement definition data structures;
• performing the set of measurements denoted by said selected measurement definition data structure, said performing step including the step of performing only those groups of measurements denoted as selected by said selected measurement definition data structure, performing only those subgroups of measurements which correspond to selected groups of measurements and which are denoted as selected by said selected measurement definition data structure, and performing only those individual measurements which correspond to selected groups and subgroups of measurements and which are denoted as selected by said selected measurement definition data structure;
• and
• storing measurement values conveyed by said apparatus to said computer in said data storage means;
• wherein only measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.

In a method of using a programmed digital computer to control the measurement, storage and analysis of a multiplicity of measurements on semiconductor wafers, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements on semiconductor wafers and communicating the resulting measurement values to said computer, the steps of:

• defining a test data structure which denotes a set of measurements that can be performed by said apparatus on a semiconductor wafer;
• said test data structure denoting a hierarchy of said set of measurements in which said measurements are divided into a plurality of chips, each said chip including a plurality of modules, each said module including a plurality of said measurements;
• establishing a multiplicity of measurement definition data structure;
• denoting in each said measurement definition data structure a hierarchically arranged mask corresponding to said hierarchy denoted in said test data structure, said mask denoting selected ones of said chips denoted in said test data structure, and selected ones of said modules;
• selecting one of said measurement definition data structure;
• performing the set of measurements denoted by said selected measurement definition data structure, said performing step including the step of performing measurements only on those chips denoted as selected by said selected measurement definition data structure, and performing measurements only on those modules which correspond to selected chips and which are denoted as selected by said selected measurement definition data structure;
• and
• storing measurement values conveyed by said apparatus to said computer in said data storage means;
• wherein only measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.