Method for producing a semiconductor laser device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsHitoshi Mizuochi, Hideyo Higuchi
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Abstract
A semiconductor laser device includes a current blocking structure having a p-n-p-n structure, provided on a first conductivity type semiconductor substrate, an active region buried in a stripe shaped groove produced in the current blocking structure, a lower cladding layer grown by liquid phase epitaxy approximately filling the stripe groove, an active layer on the lower cladding layer in the stripe groove, a waveguide layer on the active layer completely filling the groove, and a diffraction grating on the waveguide layer.
Claims1
A method for producing a semiconductor laser including a p-n-p-n current blocking structure disposed on a first conductivity type semiconductor substrate and an active region buried in a stripe groove formed in said current blocking structure comprising:
- growing a lower cladding layer in a stripe groove in a substrate by liquid phase epitaxy, nearly filling the groove;
- successively growing an active layer and a waveguide layer by one of liquid phase epitaxy and metal organic chemical vapor deposition on said lower cladding layer, completely filling said groove;
- and
- forming a diffraction grating on said waveguide layer.
Dependencies are inferred from the claim text.